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- W4322393463 abstract "use of these advantages to develop an optimized SR TXRF system at the Stanford Synchrotron Radiation Laboratory (SSRL). The results of measurements show that the Minimum Detection Limits (MDLs) of SR TXRF for 3-d transition metals are typically at a level-of 3x10{sup 8} atoms/cm{sup 2}, which is better than conventional TXRF by about a factor of 20. However, to use our SR TXRF system for practical applications, it was necessary to modify a commercially available Si (Li) detector which generates parasitic fluorescence signals. With the modified detector, we could achieve true MDLs of 3x10{sup 8} atoms/cm{sup 2} for 3-d transition metals. In addition, the analysis of Al on Si wafers is described. Al analysis is difficult because strong Si signals overlap the Al signals. In this work, the Si signals are greatly reduced by tuning the incident beam energy below the Si K edge. The results of our measurements show that the sensitivity for Al is limited by x-ray Raman scattering. Furthermore, we show the results of theoretical modeling of SR TXRF backgrounds consisting of the bremsstrahlung generated by photoelectrons, Compton scattering, and Raman scattering. To model these backgrounds, we extended conventional theoretical models by taking into account several aspects particular to SR TXRF. The results of the calculated backgrounds will be compared with experimental data. Based on these calculations, we estimate the improvement of the MDLs as a function of incident beam energy and photon flux density. We will also discuss further improvements in the MDLs through the use of third generation synchrotron radiation sources." @default.
- W4322393463 created "2023-02-27" @default.
- W4322393463 creator A5089317336 @default.
- W4322393463 date "1997-06-01" @default.
- W4322393463 modified "2023-09-27" @default.
- W4322393463 title "Synchrotron Radiation Total Reflection X-ray Fluorescence Spectroscopy for Microcontamination Analysis on Silicon Wafer Surfaces" @default.
- W4322393463 doi "https://doi.org/10.2172/1454190" @default.
- W4322393463 hasPublicationYear "1997" @default.
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