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- W4322622383 abstract "Abstract We report for the first time an implementable method to identify and suppress the driving force misalignment angle for a MEMS gyroscope working either in amplitude modulated (AM) or Lissajous frequency modulated (LFM) mode using parametric excitation. By introducing driving force misalignment angle into gyroscope dynamic equations, we illustrate that gyroscope angular rate output is affected by driving force misalignment angle and cross-axis damping jointly. We propose parametric excitation as a way to both identify and calculate the driving force misalignment angle. The identification results for a gyroscope working in both AM and LFM mode are similar, which indicates the effectiveness of the proposed identification method. Instead of using traditional amplitude control loop by adjusting the driving force, we do the automatic gain control by adjusting the parametric pump voltage so that a fixed drive voltage can be used, which also indicates fixed force coupling. Experimental results show that after suppression, the bias instability (BI) of AM mode is improved from 4.7° h −1 to 2.3° h −1 and the BI of LFM mode is improved from 1.4° h −1 to 0.9° h −1 which is the lowest result reported for LFM gyroscope." @default.
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- W4322622383 date "2023-03-17" @default.
- W4322622383 modified "2023-09-24" @default.
- W4322622383 title "Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation" @default.
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- W4322622383 doi "https://doi.org/10.1088/1361-6439/acbfc6" @default.
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