Matches in SemOpenAlex for { <https://semopenalex.org/work/W4322731244> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W4322731244 abstract "Microfabricated, thin film, Parylene C helices down to a 0.25 mm diameter were achieved using a post-fabrication thermoforming process. This overcomes the planar configuration imposed by MEMS fabrication techniques. By utilizing a thermoplastic, Parylene C backbone, planar devices can be fixtured into a desired 3D geometry and thermoformed, permanently transforming the device into the fixtured shape. This work characterizes the thermoforming process and necessary parameters to achieve 0.25 to 2.6 mm diameter helices in bare Parylene strips and microfabricated Parylene and metal devices without insulation (Parylene) or electrical (metal) failure." @default.
- W4322731244 created "2023-03-03" @default.
- W4322731244 creator A5009786732 @default.
- W4322731244 creator A5085360836 @default.
- W4322731244 date "2023-01-15" @default.
- W4322731244 modified "2023-10-18" @default.
- W4322731244 title "Thermoforming of Parylene C to Form Helical Structures" @default.
- W4322731244 cites W1973237951 @default.
- W4322731244 cites W1995745950 @default.
- W4322731244 cites W1996915400 @default.
- W4322731244 cites W2004728335 @default.
- W4322731244 cites W2006975318 @default.
- W4322731244 cites W2048910977 @default.
- W4322731244 cites W2082846479 @default.
- W4322731244 cites W2087488726 @default.
- W4322731244 cites W2163431018 @default.
- W4322731244 cites W2552587715 @default.
- W4322731244 cites W2894889640 @default.
- W4322731244 cites W3088737116 @default.
- W4322731244 doi "https://doi.org/10.1109/mems49605.2023.10052211" @default.
- W4322731244 hasPublicationYear "2023" @default.
- W4322731244 type Work @default.
- W4322731244 citedByCount "0" @default.
- W4322731244 crossrefType "proceedings-article" @default.
- W4322731244 hasAuthorship W4322731244A5009786732 @default.
- W4322731244 hasAuthorship W4322731244A5085360836 @default.
- W4322731244 hasConcept C119599485 @default.
- W4322731244 hasConcept C121684516 @default.
- W4322731244 hasConcept C127413603 @default.
- W4322731244 hasConcept C134786449 @default.
- W4322731244 hasConcept C136525101 @default.
- W4322731244 hasConcept C142724271 @default.
- W4322731244 hasConcept C159985019 @default.
- W4322731244 hasConcept C171250308 @default.
- W4322731244 hasConcept C192562407 @default.
- W4322731244 hasConcept C204787440 @default.
- W4322731244 hasConcept C206755178 @default.
- W4322731244 hasConcept C26593445 @default.
- W4322731244 hasConcept C2777385008 @default.
- W4322731244 hasConcept C2781247691 @default.
- W4322731244 hasConcept C37977207 @default.
- W4322731244 hasConcept C41008148 @default.
- W4322731244 hasConcept C521977710 @default.
- W4322731244 hasConcept C527607 @default.
- W4322731244 hasConcept C71924100 @default.
- W4322731244 hasConceptScore W4322731244C119599485 @default.
- W4322731244 hasConceptScore W4322731244C121684516 @default.
- W4322731244 hasConceptScore W4322731244C127413603 @default.
- W4322731244 hasConceptScore W4322731244C134786449 @default.
- W4322731244 hasConceptScore W4322731244C136525101 @default.
- W4322731244 hasConceptScore W4322731244C142724271 @default.
- W4322731244 hasConceptScore W4322731244C159985019 @default.
- W4322731244 hasConceptScore W4322731244C171250308 @default.
- W4322731244 hasConceptScore W4322731244C192562407 @default.
- W4322731244 hasConceptScore W4322731244C204787440 @default.
- W4322731244 hasConceptScore W4322731244C206755178 @default.
- W4322731244 hasConceptScore W4322731244C26593445 @default.
- W4322731244 hasConceptScore W4322731244C2777385008 @default.
- W4322731244 hasConceptScore W4322731244C2781247691 @default.
- W4322731244 hasConceptScore W4322731244C37977207 @default.
- W4322731244 hasConceptScore W4322731244C41008148 @default.
- W4322731244 hasConceptScore W4322731244C521977710 @default.
- W4322731244 hasConceptScore W4322731244C527607 @default.
- W4322731244 hasConceptScore W4322731244C71924100 @default.
- W4322731244 hasFunder F4320308668 @default.
- W4322731244 hasLocation W43227312441 @default.
- W4322731244 hasOpenAccess W4322731244 @default.
- W4322731244 hasPrimaryLocation W43227312441 @default.
- W4322731244 hasRelatedWork W1596256337 @default.
- W4322731244 hasRelatedWork W1760495643 @default.
- W4322731244 hasRelatedWork W1967805578 @default.
- W4322731244 hasRelatedWork W2067464657 @default.
- W4322731244 hasRelatedWork W2075464219 @default.
- W4322731244 hasRelatedWork W2308386367 @default.
- W4322731244 hasRelatedWork W2744551432 @default.
- W4322731244 hasRelatedWork W2888088501 @default.
- W4322731244 hasRelatedWork W2904542228 @default.
- W4322731244 hasRelatedWork W4322731244 @default.
- W4322731244 isParatext "false" @default.
- W4322731244 isRetracted "false" @default.
- W4322731244 workType "article" @default.