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- W4322731320 abstract "This work reports on a new acoustically isolated MEMS bulk-acoustic wave (BAW) gyroscope, which provides an average improvement in zero-rate offset (ZRO) variation of ~7X (over a range of -55 °C to 110 °C) with respect to a baseline design with no isolation structure. The design consists of a wafer-level packaged resonant disk implemented in the device layer of a silicon-on-insulator (SOI) wafer, with a physically separated silicon region in the handle layer to prevent any coupling between the external package and the resonator. The isolation volume dimensions, defined by backside trenches, were optimized through a combination of finite element analysis (FEA) simulations and characterization results using a design of experiments (DOE). The fabricated baseline devices show great noise performance with angle white noise (AWN) of 0.021 ″/√Hz, angle random walk (ARW) of 0.017 °/√h, and Allan Deviation (ADEV) values in the bias instability (BI) region as low as 0.25 °/h (0.4 °/h in average), which are projected to be the same for the isolated designs." @default.
- W4322731320 created "2023-03-03" @default.
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- W4322731320 date "2023-01-15" @default.
- W4322731320 modified "2023-10-16" @default.
- W4322731320 title "Acoustically Isolated MEMS Baw Gyroscopes" @default.
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- W4322731320 doi "https://doi.org/10.1109/mems49605.2023.10052331" @default.
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