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- W4322731429 abstract "This paper reports a micromachined multiple folded-beam disk resonator whose thermoelastic quality factor (Q <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>TED</inf> ) can exceed 2 million owning to the topology improvement and parameters optimization for the (100) silicon resonant structure. The measured total quality factor (Q) reaches 710 k, surpassing the Q of most micromachined disk resonators. Moreover, the conducted temperature experiment indicates that the thermoelastic damping (TED) is no longer the only dominant damping mechanism." @default.
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- W4322731429 date "2023-01-15" @default.
- W4322731429 modified "2023-09-24" @default.
- W4322731429 title "A Novel Multiple-Folded Beam Disk Resonator for Maximizing the Thermoelastic Quality Factor" @default.
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- W4322731429 doi "https://doi.org/10.1109/mems49605.2023.10052522" @default.
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