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- W4322731666 abstract "In this work, a conventional chip probe test system is not only adopted to evaluate functionality of thermopile sensors, but is also utilized to integrate ink dots on the devices. Compared with a pristine sensor, such devices integrated with ink dots are able to increase output by >200% in a wavelength range of 635-1550 nm, and by >40% in a temperature range of 30-450 ℃. Moreover, the size of the ink dots can be well controlled in an 8-inch wafer, and the performance enhancement ability of this simple and low-cost approach has a satisfactory uniformity, thus it has great potential in mass preparation of thermopile sensors with high performance." @default.
- W4322731666 created "2023-03-03" @default.
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- W4322731666 date "2023-01-15" @default.
- W4322731666 modified "2023-10-16" @default.
- W4322731666 title "A Performance Enhancement Method for Thermopile Sensors Using a Chip Probe Test System" @default.
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- W4322731666 doi "https://doi.org/10.1109/mems49605.2023.10052327" @default.
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