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- W4322731692 abstract "Gas sensing materials are typically loaded on designated area of micro-electrode via drop-casting for application in gas sensors. However, wafer-level patterning of gas sensitive materials with good reproducibility still faces challenge. In this work, we develop an effective ‘top-down’ approach to produce wafer-scale miniaturized gas sensing devices with high-throughput using standard photolithography of a mixture of photoresist and tin oxide (SnO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> ) nanomaterials suspension, followed by calcination. The prepared gas sensing chips based on the proposed method exhibited satisfactory reproducibility and uniformity of sensing response toward ethanol detection, indicating promising application for large-scale production of MEMS gas sensors." @default.
- W4322731692 created "2023-03-03" @default.
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- W4322731692 date "2023-01-15" @default.
- W4322731692 modified "2023-10-17" @default.
- W4322731692 title "Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors" @default.
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- W4322731692 doi "https://doi.org/10.1109/mems49605.2023.10052390" @default.
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