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- W4322732145 abstract "In this paper, we report the integration of a non-CMOS transition metal oxide composite thin film with a high negative temperature coefficient resistance (NTCR) of 3.8 %/K on a silicon nitride membrane for uncooled infrared microbolometer working in the long wavelength infrared (LWIR) region. The NTC thin film is fabricated by a chemical solution deposition process requiring high crystallization temperature (>750°C). Different micromachined silicon-nitride membrane-supported bolometers (1, 2×2 and 4×4 pixels) with a 170×170 µm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> pixel size are successfully fabricated and packaged in a vacuum-shielded TO housing. The fabricated devices exhibit a typical noise equivalent temperature difference (NETD) value down to 15 mK×Hz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-1/2</sup> and a high specific detectivity characteristic of 1.4×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>8</sup> cm×Hz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> ×W <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-1</sup> ." @default.
- W4322732145 created "2023-03-03" @default.
- W4322732145 creator A5002640385 @default.
- W4322732145 creator A5020415216 @default.
- W4322732145 creator A5025382991 @default.
- W4322732145 creator A5027783714 @default.
- W4322732145 creator A5027890146 @default.
- W4322732145 creator A5037222290 @default.
- W4322732145 creator A5037553683 @default.
- W4322732145 creator A5037966199 @default.
- W4322732145 creator A5067330812 @default.
- W4322732145 creator A5083063107 @default.
- W4322732145 creator A5090828680 @default.
- W4322732145 date "2023-01-15" @default.
- W4322732145 modified "2023-10-13" @default.
- W4322732145 title "Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection" @default.
- W4322732145 cites W1982893865 @default.
- W4322732145 cites W2029716644 @default.
- W4322732145 cites W2037849865 @default.
- W4322732145 cites W2051165286 @default.
- W4322732145 cites W2946515411 @default.
- W4322732145 cites W2956334910 @default.
- W4322732145 cites W3155913123 @default.
- W4322732145 doi "https://doi.org/10.1109/mems49605.2023.10052556" @default.
- W4322732145 hasPublicationYear "2023" @default.
- W4322732145 type Work @default.
- W4322732145 citedByCount "0" @default.
- W4322732145 crossrefType "proceedings-article" @default.
- W4322732145 hasAuthorship W4322732145A5002640385 @default.
- W4322732145 hasAuthorship W4322732145A5020415216 @default.
- W4322732145 hasAuthorship W4322732145A5025382991 @default.
- W4322732145 hasAuthorship W4322732145A5027783714 @default.
- W4322732145 hasAuthorship W4322732145A5027890146 @default.
- W4322732145 hasAuthorship W4322732145A5037222290 @default.
- W4322732145 hasAuthorship W4322732145A5037553683 @default.
- W4322732145 hasAuthorship W4322732145A5037966199 @default.
- W4322732145 hasAuthorship W4322732145A5067330812 @default.
- W4322732145 hasAuthorship W4322732145A5083063107 @default.
- W4322732145 hasAuthorship W4322732145A5090828680 @default.
- W4322732145 hasConcept C113196181 @default.
- W4322732145 hasConcept C120665830 @default.
- W4322732145 hasConcept C121332964 @default.
- W4322732145 hasConcept C159985019 @default.
- W4322732145 hasConcept C16643434 @default.
- W4322732145 hasConcept C178790620 @default.
- W4322732145 hasConcept C185592680 @default.
- W4322732145 hasConcept C192562407 @default.
- W4322732145 hasConcept C21028948 @default.
- W4322732145 hasConcept C2776111576 @default.
- W4322732145 hasConcept C49040817 @default.
- W4322732145 hasConcept C94915269 @default.
- W4322732145 hasConceptScore W4322732145C113196181 @default.
- W4322732145 hasConceptScore W4322732145C120665830 @default.
- W4322732145 hasConceptScore W4322732145C121332964 @default.
- W4322732145 hasConceptScore W4322732145C159985019 @default.
- W4322732145 hasConceptScore W4322732145C16643434 @default.
- W4322732145 hasConceptScore W4322732145C178790620 @default.
- W4322732145 hasConceptScore W4322732145C185592680 @default.
- W4322732145 hasConceptScore W4322732145C192562407 @default.
- W4322732145 hasConceptScore W4322732145C21028948 @default.
- W4322732145 hasConceptScore W4322732145C2776111576 @default.
- W4322732145 hasConceptScore W4322732145C49040817 @default.
- W4322732145 hasConceptScore W4322732145C94915269 @default.
- W4322732145 hasLocation W43227321451 @default.
- W4322732145 hasOpenAccess W4322732145 @default.
- W4322732145 hasPrimaryLocation W43227321451 @default.
- W4322732145 hasRelatedWork W1583485638 @default.
- W4322732145 hasRelatedWork W18561176 @default.
- W4322732145 hasRelatedWork W1977966841 @default.
- W4322732145 hasRelatedWork W2017539549 @default.
- W4322732145 hasRelatedWork W2093085334 @default.
- W4322732145 hasRelatedWork W2337477507 @default.
- W4322732145 hasRelatedWork W2792211003 @default.
- W4322732145 hasRelatedWork W3027591806 @default.
- W4322732145 hasRelatedWork W2463152212 @default.
- W4322732145 hasRelatedWork W2472567563 @default.
- W4322732145 isParatext "false" @default.
- W4322732145 isRetracted "false" @default.
- W4322732145 workType "article" @default.