FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4322738663> ?p ?o ?g. }

• W4322738663 endingPage "045006" @default.
• W4322738663 startingPage "045006" @default.
• W4322738663 abstract "Abstract The laterally-excited bulk acoustic resonators (XBARs) have been gaining attention for their use as radio frequency filters due to their ability to resonate at high frequencies (>5 GHz) and wide fractional bandwidth. However, the limited cognition about the resonant characteristics of XBARs remains an obstacle for its commercial application. In this paper, the influence of electrode pitch ( <?CDATA $P$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>P</mml:mi> </mml:math> ) on resonant frequency ( <?CDATA ${{,,f}_{{text{res}}}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mrow> <mml:mi>f</mml:mi> </mml:mrow> <mml:mrow> <mml:mrow> <mml:mtext>res</mml:mtext> </mml:mrow> </mml:mrow> </mml:msub> </mml:mrow> </mml:math> ), quality factor ( <?CDATA $Q$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>Q</mml:mi> </mml:math> ) and effective electromechanical coupling coefficient ( <?CDATA $K_{{text{eff}}}^2$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mi>K</mml:mi> <mml:mrow> <mml:mrow> <mml:mtext>eff</mml:mtext> </mml:mrow> </mml:mrow> <mml:mn>2</mml:mn> </mml:msubsup> </mml:math> ) in X-cut LiNbO 3 membrane-based resonators are investigated for both the XBAR mode and first-order asymmetry mode ( <?CDATA ${A_1}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mi>A</mml:mi> <mml:mn>1</mml:mn> </mml:msub> </mml:mrow> </mml:math> ). The XBAR mode with <?CDATA ${f_{{text{res}}}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mi>f</mml:mi> <mml:mrow> <mml:mrow> <mml:mtext>res</mml:mtext> </mml:mrow> </mml:mrow> </mml:msub> </mml:mrow> </mml:math> above 8 GHz was excited at a metallization ratio ( <?CDATA $eta $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>η</mml:mi> </mml:math> ) less than 0.5 when <?CDATA $P$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>P</mml:mi> </mml:math> was within 5 <?CDATA $mu {text{m}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>μ</mml:mi> <mml:mrow> <mml:mtext>m</mml:mtext> </mml:mrow> </mml:math> to 10 <?CDATA $mu {text{m}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>μ</mml:mi> <mml:mrow> <mml:mtext>m</mml:mtext> </mml:mrow> </mml:math> , as well as <?CDATA $eta $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>η</mml:mi> </mml:math> less than 0.6 when <?CDATA $P$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>P</mml:mi> </mml:math> was within 15 <?CDATA $mu {text{m}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>μ</mml:mi> <mml:mrow> <mml:mtext>m</mml:mtext> </mml:mrow> </mml:math> to 20 <?CDATA $mu {text{m}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>μ</mml:mi> <mml:mrow> <mml:mtext>m</mml:mtext> </mml:mrow> </mml:math> . Meanwhile, we revealed that increasing <?CDATA $P$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>P</mml:mi> </mml:math> had negligible effect on the <?CDATA ${f_{{text{res}}}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mi>f</mml:mi> <mml:mrow> <mml:mrow> <mml:mtext>res</mml:mtext> </mml:mrow> </mml:mrow> </mml:msub> </mml:mrow> </mml:math> of XBAR mode but did produce a positive improvement on its <?CDATA $K_{{text{eff}}}^2$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mi>K</mml:mi> <mml:mrow> <mml:mrow> <mml:mtext>eff</mml:mtext> </mml:mrow> </mml:mrow> <mml:mn>2</mml:mn> </mml:msubsup> </mml:math> and <?CDATA $Q$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>Q</mml:mi> </mml:math> . In contrast, both <?CDATA ${f_{{text{res}}}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mi>f</mml:mi> <mml:mrow> <mml:mrow> <mml:mtext>res</mml:mtext> </mml:mrow> </mml:mrow> </mml:msub> </mml:mrow> </mml:math> and <?CDATA $Q$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>Q</mml:mi> </mml:math> of the <?CDATA ${A_1}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mi>A</mml:mi> <mml:mn>1</mml:mn> </mml:msub> </mml:mrow> </mml:math> mode gradually declined with increasing <?CDATA $P$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>P</mml:mi> </mml:math> . In addition, we have demonstrated the disparity between simulated and calculated <?CDATA ${C_0}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mrow> <mml:msub> <mml:mi>C</mml:mi> <mml:mn>0</mml:mn> </mml:msub> </mml:mrow> </mml:math> as a function of <?CDATA $eta $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>η</mml:mi> </mml:math> , varying with <?CDATA $P$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi>P</mml:mi> </mml:math> , to achieve a more accurate prediction of capacitance behavior in resonators. Overall, this work has demonstrated the complex relationship of resonant and capacitance properties of X-cut membrane-based resonators on the electrode pitch, which will aid in optimal designing of high-performance filters." @default.
• W4322738663 created "2023-03-03" @default.
• W4322738663 creator A5007877897 @default.
• W4322738663 creator A5010669910 @default.
• W4322738663 creator A5013003419 @default.
• W4322738663 creator A5047982070 @default.
• W4322738663 creator A5055387547 @default.
• W4322738663 creator A5063514154 @default.
• W4322738663 creator A5067785955 @default.
• W4322738663 creator A5070151668 @default.
• W4322738663 creator A5078166832 @default.
• W4322738663 creator A5085365888 @default.
• W4322738663 creator A5090190708 @default.
• W4322738663 date "2023-03-09" @default.
• W4322738663 modified "2023-09-24" @default.
• W4322738663 title "Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO₃ membrane-based laterally-excited bulk acoustic resonator" @default.
• W4322738663 cites W1666185455 @default.
• W4322738663 cites W1985851655 @default.
• W4322738663 cites W2008851784 @default.
• W4322738663 cites W2011632456 @default.
• W4322738663 cites W2064043184 @default.
• W4322738663 cites W2086376080 @default.
• W4322738663 cites W2089829079 @default.
• W4322738663 cites W2097676893 @default.
• W4322738663 cites W2130187575 @default.
• W4322738663 cites W2154088248 @default.
• W4322738663 cites W2155525579 @default.
• W4322738663 cites W2158632792 @default.
• W4322738663 cites W2164448710 @default.
• W4322738663 cites W2164825615 @default.
• W4322738663 cites W2595447211 @default.
• W4322738663 cites W2899625582 @default.
• W4322738663 cites W2946929626 @default.
• W4322738663 cites W3005042732 @default.
• W4322738663 cites W3039703570 @default.
• W4322738663 cites W3135211871 @default.
• W4322738663 cites W3159072330 @default.
• W4322738663 cites W3197130494 @default.
• W4322738663 doi "https://doi.org/10.1088/1361-6439/acbfc2" @default.
• W4322738663 hasPublicationYear "2023" @default.
• W4322738663 type Work @default.
• W4322738663 citedByCount "1" @default.
• W4322738663 countsByYear W43227386632023 @default.
• W4322738663 crossrefType "journal-article" @default.
• W4322738663 hasAuthorship W4322738663A5007877897 @default.
• W4322738663 hasAuthorship W4322738663A5010669910 @default.
• W4322738663 hasAuthorship W4322738663A5013003419 @default.
• W4322738663 hasAuthorship W4322738663A5047982070 @default.
• W4322738663 hasAuthorship W4322738663A5055387547 @default.
• W4322738663 hasAuthorship W4322738663A5063514154 @default.
• W4322738663 hasAuthorship W4322738663A5067785955 @default.
• W4322738663 hasAuthorship W4322738663A5070151668 @default.
• W4322738663 hasAuthorship W4322738663A5078166832 @default.
• W4322738663 hasAuthorship W4322738663A5085365888 @default.
• W4322738663 hasAuthorship W4322738663A5090190708 @default.
• W4322738663 hasConcept C113196181 @default.
• W4322738663 hasConcept C11413529 @default.
• W4322738663 hasConcept C154945302 @default.
• W4322738663 hasConcept C185592680 @default.
• W4322738663 hasConcept C192562407 @default.
• W4322738663 hasConcept C41008148 @default.
• W4322738663 hasConcept C43617362 @default.
• W4322738663 hasConceptScore W4322738663C113196181 @default.
• W4322738663 hasConceptScore W4322738663C11413529 @default.
• W4322738663 hasConceptScore W4322738663C154945302 @default.
• W4322738663 hasConceptScore W4322738663C185592680 @default.
• W4322738663 hasConceptScore W4322738663C192562407 @default.
• W4322738663 hasConceptScore W4322738663C41008148 @default.
• W4322738663 hasConceptScore W4322738663C43617362 @default.
• W4322738663 hasFunder F4320335777 @default.
• W4322738663 hasIssue "4" @default.
• W4322738663 hasLocation W43227386631 @default.
• W4322738663 hasOpenAccess W4322738663 @default.
• W4322738663 hasPrimaryLocation W43227386631 @default.
• W4322738663 hasRelatedWork W2351491280 @default.
• W4322738663 hasRelatedWork W2371447506 @default.
• W4322738663 hasRelatedWork W2386767533 @default.
• W4322738663 hasRelatedWork W2737498735 @default.
• W4322738663 hasRelatedWork W2748952813 @default.
• W4322738663 hasRelatedWork W2898370298 @default.
• W4322738663 hasRelatedWork W2899084033 @default.
• W4322738663 hasRelatedWork W303980170 @default.
• W4322738663 hasRelatedWork W3141679561 @default.
• W4322738663 hasRelatedWork W4225307033 @default.
• W4322738663 hasVolume "33" @default.
• W4322738663 isParatext "false" @default.
• W4322738663 isRetracted "false" @default.
• W4322738663 workType "article" @default.