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- W4323823174 abstract "Single-photon avalanche diodes (SPADs) are high-performance light-sensitive sensors operating in low-light condition. Si-SPADs manufactured through standard CMOS fabrication process have advantages in terms of manufacturing cost, low power consumption, device shrinkage, and process stability compared to SPADs on custom fabrication. A deeper multiplication using deep n-well (DNW) improves key performances of Si-SPAD such as dark count rate (DCR) and photon detection efficiency (PDE). Here, the guard ring (GR) must be included for deep junction SPAD because light detection efficiency is lowered due to premature edge breakdown (PEB) generated by strong electric field at the edge. PEB affects not only the characteristics but also the manufacturing uniformity. Therefore, the DNW should be carefully designed to show better performance and stability for Si-SPADs. In this paper, the effects of electrical characteristics such as current-voltage (I-V) curve, DCR, off leakage, and breakdown voltage, and process stability on DNW implanted SPAD with GR variation are analyzed using actual fabricated SPAD measurement data and the calibrated technology computer-aided design (TCAD) simulated results. When the deep multiplication junction is formed using the higher ion implantation energy, the penetration effect and the process instability can be generated and it can also weaken the GR effect, which prevents PEB caused by having a stronger electric field than the multiplication zone. In addition, it is verified to prevent the risk of designing a Si-SPAD and die-to-die variation due to DNW implantation. Based on the results, deep junction design scheme for high resolution and mass production can be suggested." @default.
- W4323823174 created "2023-03-11" @default.
- W4323823174 creator A5032712631 @default.
- W4323823174 creator A5048577461 @default.
- W4323823174 creator A5062689867 @default.
- W4323823174 creator A5063819349 @default.
- W4323823174 date "2023-03-10" @default.
- W4323823174 modified "2023-10-17" @default.
- W4323823174 title "Design risk for fabrication stability of silicon single-photon avalanche diodes with deep N-well implantation" @default.
- W4323823174 cites W2038054094 @default.
- W4323823174 cites W2038825406 @default.
- W4323823174 cites W2088585964 @default.
- W4323823174 cites W2094491720 @default.
- W4323823174 cites W2151016044 @default.
- W4323823174 cites W2904013483 @default.
- W4323823174 cites W4200288180 @default.
- W4323823174 cites W4205802069 @default.
- W4323823174 cites W4210424308 @default.
- W4323823174 cites W4213177060 @default.
- W4323823174 cites W4286542020 @default.
- W4323823174 cites W4311591663 @default.
- W4323823174 doi "https://doi.org/10.1117/12.2644755" @default.
- W4323823174 hasPublicationYear "2023" @default.
- W4323823174 type Work @default.
- W4323823174 citedByCount "0" @default.
- W4323823174 crossrefType "proceedings-article" @default.
- W4323823174 hasAuthorship W4323823174A5032712631 @default.
- W4323823174 hasAuthorship W4323823174A5048577461 @default.
- W4323823174 hasAuthorship W4323823174A5062689867 @default.
- W4323823174 hasAuthorship W4323823174A5063819349 @default.
- W4323823174 hasConcept C109679912 @default.
- W4323823174 hasConcept C119321828 @default.
- W4323823174 hasConcept C119599485 @default.
- W4323823174 hasConcept C120665830 @default.
- W4323823174 hasConcept C121332964 @default.
- W4323823174 hasConcept C127413603 @default.
- W4323823174 hasConcept C136525101 @default.
- W4323823174 hasConcept C142724271 @default.
- W4323823174 hasConcept C165801399 @default.
- W4323823174 hasConcept C172385210 @default.
- W4323823174 hasConcept C192562407 @default.
- W4323823174 hasConcept C193361668 @default.
- W4323823174 hasConcept C204787440 @default.
- W4323823174 hasConcept C46362747 @default.
- W4323823174 hasConcept C49040817 @default.
- W4323823174 hasConcept C50566616 @default.
- W4323823174 hasConcept C71924100 @default.
- W4323823174 hasConcept C78434282 @default.
- W4323823174 hasConcept C94915269 @default.
- W4323823174 hasConcept C95341827 @default.
- W4323823174 hasConceptScore W4323823174C109679912 @default.
- W4323823174 hasConceptScore W4323823174C119321828 @default.
- W4323823174 hasConceptScore W4323823174C119599485 @default.
- W4323823174 hasConceptScore W4323823174C120665830 @default.
- W4323823174 hasConceptScore W4323823174C121332964 @default.
- W4323823174 hasConceptScore W4323823174C127413603 @default.
- W4323823174 hasConceptScore W4323823174C136525101 @default.
- W4323823174 hasConceptScore W4323823174C142724271 @default.
- W4323823174 hasConceptScore W4323823174C165801399 @default.
- W4323823174 hasConceptScore W4323823174C172385210 @default.
- W4323823174 hasConceptScore W4323823174C192562407 @default.
- W4323823174 hasConceptScore W4323823174C193361668 @default.
- W4323823174 hasConceptScore W4323823174C204787440 @default.
- W4323823174 hasConceptScore W4323823174C46362747 @default.
- W4323823174 hasConceptScore W4323823174C49040817 @default.
- W4323823174 hasConceptScore W4323823174C50566616 @default.
- W4323823174 hasConceptScore W4323823174C71924100 @default.
- W4323823174 hasConceptScore W4323823174C78434282 @default.
- W4323823174 hasConceptScore W4323823174C94915269 @default.
- W4323823174 hasConceptScore W4323823174C95341827 @default.
- W4323823174 hasLocation W43238231741 @default.
- W4323823174 hasOpenAccess W4323823174 @default.
- W4323823174 hasPrimaryLocation W43238231741 @default.
- W4323823174 hasRelatedWork W1034736657 @default.
- W4323823174 hasRelatedWork W1886373530 @default.
- W4323823174 hasRelatedWork W2116225842 @default.
- W4323823174 hasRelatedWork W2120108195 @default.
- W4323823174 hasRelatedWork W2151805512 @default.
- W4323823174 hasRelatedWork W2169172055 @default.
- W4323823174 hasRelatedWork W2171642780 @default.
- W4323823174 hasRelatedWork W2737045456 @default.
- W4323823174 hasRelatedWork W2912584319 @default.
- W4323823174 hasRelatedWork W4312720371 @default.
- W4323823174 isParatext "false" @default.
- W4323823174 isRetracted "false" @default.
- W4323823174 workType "article" @default.