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- W4324028429 abstract "Silicon nitride (SiN) and silicon dioxide (SiO<sub>2</sub>) are high-index and low-index refraction materials that qualify them for waveguide applications. Here, we present the SiN thin film by studying hydrogen content on the surface of the fabricated thin films. The SiN thin films were deposited via plasma-enhanced chemical vapor deposition (PECVD) on a P-type (111) Silicon wafer with a silicon dioxide layer of 1 micron and resistivity of ~ 100 ohm-cm. Hydrogen bonds are formed on the thin-film surface which causes high propagation loss as both N-H bonds and Si-H bonds lead to absorption in the telecom spectrum. Ammonia-free deposition was utilized using only silane (SiH<sub>4</sub>) and nitrogen (N<sub>2</sub>) as precursors gases in PECVD run to reduce the hydrogen content. Process pressure was kept constant at 650 mTorr, varying the (SiH<sub>4</sub>) concentration, RF power and temperature. The thicknesses of the deposited thin films were kept ~300 nm determined by scanning electron microscopy (SEM). while surface roughness was examined using atomic force microscopy (AFM). The hydrogen bonding content was studied using Raman, Fourier-transform infrared spectroscopy (FTIR) and Photoluminescence." @default.
- W4324028429 created "2023-03-14" @default.
- W4324028429 creator A5018407761 @default.
- W4324028429 creator A5051204724 @default.
- W4324028429 creator A5060052248 @default.
- W4324028429 creator A5077449820 @default.
- W4324028429 date "2023-03-13" @default.
- W4324028429 modified "2023-09-26" @default.
- W4324028429 title "Characterization study of silicon nitride (SiN) thin-film hydrogen bonding for waveguide applications" @default.
- W4324028429 cites W1649765845 @default.
- W4324028429 cites W1974421866 @default.
- W4324028429 cites W1988528413 @default.
- W4324028429 cites W2008940591 @default.
- W4324028429 cites W2009338951 @default.
- W4324028429 cites W2037482297 @default.
- W4324028429 cites W2048241602 @default.
- W4324028429 cites W2055497178 @default.
- W4324028429 cites W2060824718 @default.
- W4324028429 cites W3118967930 @default.
- W4324028429 cites W4200229973 @default.
- W4324028429 cites W4280613411 @default.
- W4324028429 doi "https://doi.org/10.1117/12.2652188" @default.
- W4324028429 hasPublicationYear "2023" @default.
- W4324028429 type Work @default.
- W4324028429 citedByCount "0" @default.
- W4324028429 crossrefType "proceedings-article" @default.
- W4324028429 hasAuthorship W4324028429A5018407761 @default.
- W4324028429 hasAuthorship W4324028429A5051204724 @default.
- W4324028429 hasAuthorship W4324028429A5060052248 @default.
- W4324028429 hasAuthorship W4324028429A5077449820 @default.
- W4324028429 hasConcept C113196181 @default.
- W4324028429 hasConcept C120665830 @default.
- W4324028429 hasConcept C121332964 @default.
- W4324028429 hasConcept C159985019 @default.
- W4324028429 hasConcept C160892712 @default.
- W4324028429 hasConcept C171250308 @default.
- W4324028429 hasConcept C185592680 @default.
- W4324028429 hasConcept C19067145 @default.
- W4324028429 hasConcept C192562407 @default.
- W4324028429 hasConcept C26771246 @default.
- W4324028429 hasConcept C2777431650 @default.
- W4324028429 hasConcept C2778024649 @default.
- W4324028429 hasConcept C2779089622 @default.
- W4324028429 hasConcept C38347018 @default.
- W4324028429 hasConcept C40003534 @default.
- W4324028429 hasConcept C43617362 @default.
- W4324028429 hasConcept C49040817 @default.
- W4324028429 hasConcept C544956773 @default.
- W4324028429 hasConcept C57410435 @default.
- W4324028429 hasConceptScore W4324028429C113196181 @default.
- W4324028429 hasConceptScore W4324028429C120665830 @default.
- W4324028429 hasConceptScore W4324028429C121332964 @default.
- W4324028429 hasConceptScore W4324028429C159985019 @default.
- W4324028429 hasConceptScore W4324028429C160892712 @default.
- W4324028429 hasConceptScore W4324028429C171250308 @default.
- W4324028429 hasConceptScore W4324028429C185592680 @default.
- W4324028429 hasConceptScore W4324028429C19067145 @default.
- W4324028429 hasConceptScore W4324028429C192562407 @default.
- W4324028429 hasConceptScore W4324028429C26771246 @default.
- W4324028429 hasConceptScore W4324028429C2777431650 @default.
- W4324028429 hasConceptScore W4324028429C2778024649 @default.
- W4324028429 hasConceptScore W4324028429C2779089622 @default.
- W4324028429 hasConceptScore W4324028429C38347018 @default.
- W4324028429 hasConceptScore W4324028429C40003534 @default.
- W4324028429 hasConceptScore W4324028429C43617362 @default.
- W4324028429 hasConceptScore W4324028429C49040817 @default.
- W4324028429 hasConceptScore W4324028429C544956773 @default.
- W4324028429 hasConceptScore W4324028429C57410435 @default.
- W4324028429 hasLocation W43240284291 @default.
- W4324028429 hasOpenAccess W4324028429 @default.
- W4324028429 hasPrimaryLocation W43240284291 @default.
- W4324028429 hasRelatedWork W1996564451 @default.
- W4324028429 hasRelatedWork W2010769555 @default.
- W4324028429 hasRelatedWork W2016866535 @default.
- W4324028429 hasRelatedWork W2042245115 @default.
- W4324028429 hasRelatedWork W2087328166 @default.
- W4324028429 hasRelatedWork W2286863473 @default.
- W4324028429 hasRelatedWork W2766374591 @default.
- W4324028429 hasRelatedWork W3147110782 @default.
- W4324028429 hasRelatedWork W4237948153 @default.
- W4324028429 hasRelatedWork W2510416009 @default.
- W4324028429 isParatext "false" @default.
- W4324028429 isRetracted "false" @default.
- W4324028429 workType "article" @default.