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- W4324133029 abstract "Until recently, lack of stable p-type doping source in HVPE hindered its use to the application of III-nitride light emitting devices. Recently, K. Ohnishi discovered the stable MgO source for p-type doping in GaN HVPE. This has enabled the use of HVPE for light emitting devices as well as electron devices such as vertical MOSFET. In this article, we will review the current HVPE technology of p-GaN HVPE, multi-junction AlInGaP/InGaP/GaAs solar cell, InGaN HVPE by trichlorides, and discuss the challenge and opportunities of III-nitride HVPE in terms of epitaxial layer design and the remaining issues of the growth of the low temperature buffer, MQWs as well as the source supply design to grow multilayer structures." @default.
- W4324133029 created "2023-03-15" @default.
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- W4324133029 date "2023-03-14" @default.
- W4324133029 modified "2023-09-30" @default.
- W4324133029 title "Challenges and opportunities of nitride light emitting devices by HVPE thanks to a stable Mg source" @default.
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- W4324133029 doi "https://doi.org/10.1117/12.2647336" @default.
- W4324133029 hasPublicationYear "2023" @default.
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