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- W4324133737 abstract "The angular distribution of sputtered particles is an effective tool for obtaining information on the composition and structure of the target and even on the beam energies. The particles of Inconel 718 super alloy sputtered at full angle corresponding to each of the probes were calculated. The SRIM program associated with a new ANGULARE simulation program was used to obtain the sputtering yields and angular distribution of sputtered Fe, Al, Cr, Mo, Nb, Ni and Ti particles from Inconel 718 . The simulation was performed for a large number of incident ions (5 keV, Kr + ) and allows the computer to count the number of particles emitted at the solid angle. Angular distributions of pulverized Inconel 718 particles and pulverized yields were compared to the literature. Furthermore, the angular distribution of Inconel 718 for the differential sputtering yields shows an under-cosine tendency." @default.
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- W4324133737 date "2023-01-01" @default.
- W4324133737 modified "2023-09-23" @default.
- W4324133737 title "Angular distribution of sputtered particles from Inconel<sup>718</sup>: a simulation study" @default.
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- W4324133737 doi "https://doi.org/10.1051/epjap/2023220334" @default.
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