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- W4324144412 abstract "A moving porous media (MPM) modeling methodology was developed for reactor-scale CFD simulations of continuous spatial particle atomic layer deposition (ALD). The continuous vibrating reactor process for particle atomic layer deposition (CVR-ALD) was modeled by treating the powder bed as a porous media which conveys as a sliding and layering dynamic mesh zone inside the vibrating reactor zone. Candidate porous reactor baseplates were experimentally characterized using x-ray computed tomography (XRCT), porometry, porosimetry, and atomic force microscopy (AFM) before permeabilities from flow tests were used as inputs to the MPM model. Parameter sweeps over vibration magnitude, powder bed convection speed, and precursor mass fraction revealed the dependence of surface titration uniformity and residual gas breakthrough on operating conditions and powder properties. Parasitic chemical vapor deposition (CVD) reactions were observed in the first precursor zone when dose start times and inlet gas compositions were not optimized." @default.
- W4324144412 created "2023-03-15" @default.
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- W4324144412 date "2023-05-01" @default.
- W4324144412 modified "2023-10-09" @default.
- W4324144412 title "A moving porous media model for continuous spatial particle ALD" @default.
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- W4324144412 doi "https://doi.org/10.1016/j.powtec.2023.118448" @default.
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