Matches in SemOpenAlex for { <https://semopenalex.org/work/W4328004814> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W4328004814 endingPage "1475" @default.
- W4328004814 startingPage "1475" @default.
- W4328004814 abstract "It is shown that the irradiation by focused electron beam with electron energy of 10 keV of two-layer amorphous silicon-carbon films 60 nm thick results in films partial crystallization. Moreover, in the irradiated zone the layer of crystalline silicon carbide with luminescent properties is formed. The observed effects are confirmed by methods of Raman spectroscopy and by luminescence spectra Keywords: silicon, carbon, silicon carbide, film, structure, electron beam, Raman spectroscopy." @default.
- W4328004814 created "2023-03-22" @default.
- W4328004814 creator A5002022650 @default.
- W4328004814 creator A5021581163 @default.
- W4328004814 creator A5049397623 @default.
- W4328004814 creator A5062390869 @default.
- W4328004814 date "2022-01-01" @default.
- W4328004814 modified "2023-09-30" @default.
- W4328004814 title "Crystallization and silicon carbide formation in two-layer amorphous silicon-carbon films during electron irradiation" @default.
- W4328004814 doi "https://doi.org/10.21883/tp.2022.11.55178.180-22" @default.
- W4328004814 hasPublicationYear "2022" @default.
- W4328004814 type Work @default.
- W4328004814 citedByCount "1" @default.
- W4328004814 countsByYear W43280048142023 @default.
- W4328004814 crossrefType "journal-article" @default.
- W4328004814 hasAuthorship W4328004814A5002022650 @default.
- W4328004814 hasAuthorship W4328004814A5021581163 @default.
- W4328004814 hasAuthorship W4328004814A5049397623 @default.
- W4328004814 hasAuthorship W4328004814A5062390869 @default.
- W4328004814 hasBestOaLocation W43280048141 @default.
- W4328004814 hasConcept C104779481 @default.
- W4328004814 hasConcept C105163801 @default.
- W4328004814 hasConcept C111337013 @default.
- W4328004814 hasConcept C113196181 @default.
- W4328004814 hasConcept C120665830 @default.
- W4328004814 hasConcept C121332964 @default.
- W4328004814 hasConcept C127413603 @default.
- W4328004814 hasConcept C140205800 @default.
- W4328004814 hasConcept C159985019 @default.
- W4328004814 hasConcept C171250308 @default.
- W4328004814 hasConcept C178790620 @default.
- W4328004814 hasConcept C185544564 @default.
- W4328004814 hasConcept C185592680 @default.
- W4328004814 hasConcept C192562407 @default.
- W4328004814 hasConcept C201931942 @default.
- W4328004814 hasConcept C203036418 @default.
- W4328004814 hasConcept C2776390347 @default.
- W4328004814 hasConcept C2779227376 @default.
- W4328004814 hasConcept C2779667780 @default.
- W4328004814 hasConcept C2780722187 @default.
- W4328004814 hasConcept C40003534 @default.
- W4328004814 hasConcept C42360764 @default.
- W4328004814 hasConcept C49040817 @default.
- W4328004814 hasConcept C5335593 @default.
- W4328004814 hasConcept C544956773 @default.
- W4328004814 hasConcept C56052488 @default.
- W4328004814 hasConcept C80086925 @default.
- W4328004814 hasConcept C8010536 @default.
- W4328004814 hasConceptScore W4328004814C104779481 @default.
- W4328004814 hasConceptScore W4328004814C105163801 @default.
- W4328004814 hasConceptScore W4328004814C111337013 @default.
- W4328004814 hasConceptScore W4328004814C113196181 @default.
- W4328004814 hasConceptScore W4328004814C120665830 @default.
- W4328004814 hasConceptScore W4328004814C121332964 @default.
- W4328004814 hasConceptScore W4328004814C127413603 @default.
- W4328004814 hasConceptScore W4328004814C140205800 @default.
- W4328004814 hasConceptScore W4328004814C159985019 @default.
- W4328004814 hasConceptScore W4328004814C171250308 @default.
- W4328004814 hasConceptScore W4328004814C178790620 @default.
- W4328004814 hasConceptScore W4328004814C185544564 @default.
- W4328004814 hasConceptScore W4328004814C185592680 @default.
- W4328004814 hasConceptScore W4328004814C192562407 @default.
- W4328004814 hasConceptScore W4328004814C201931942 @default.
- W4328004814 hasConceptScore W4328004814C203036418 @default.
- W4328004814 hasConceptScore W4328004814C2776390347 @default.
- W4328004814 hasConceptScore W4328004814C2779227376 @default.
- W4328004814 hasConceptScore W4328004814C2779667780 @default.
- W4328004814 hasConceptScore W4328004814C2780722187 @default.
- W4328004814 hasConceptScore W4328004814C40003534 @default.
- W4328004814 hasConceptScore W4328004814C42360764 @default.
- W4328004814 hasConceptScore W4328004814C49040817 @default.
- W4328004814 hasConceptScore W4328004814C5335593 @default.
- W4328004814 hasConceptScore W4328004814C544956773 @default.
- W4328004814 hasConceptScore W4328004814C56052488 @default.
- W4328004814 hasConceptScore W4328004814C80086925 @default.
- W4328004814 hasConceptScore W4328004814C8010536 @default.
- W4328004814 hasIssue "11" @default.
- W4328004814 hasLocation W43280048141 @default.
- W4328004814 hasOpenAccess W4328004814 @default.
- W4328004814 hasPrimaryLocation W43280048141 @default.
- W4328004814 hasRelatedWork W2003795045 @default.
- W4328004814 hasRelatedWork W2013783467 @default.
- W4328004814 hasRelatedWork W2037432217 @default.
- W4328004814 hasRelatedWork W2043754241 @default.
- W4328004814 hasRelatedWork W2061728122 @default.
- W4328004814 hasRelatedWork W2071216581 @default.
- W4328004814 hasRelatedWork W2079015012 @default.
- W4328004814 hasRelatedWork W2083321254 @default.
- W4328004814 hasRelatedWork W2525290708 @default.
- W4328004814 hasRelatedWork W4311460984 @default.
- W4328004814 hasVolume "67" @default.
- W4328004814 isParatext "false" @default.
- W4328004814 isRetracted "false" @default.
- W4328004814 workType "article" @default.