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- W4328004821 abstract "The failure regions during sliding nano indentation of technologically important SiCN thin films resembled geometrical shapes of Lemniscate and cardiod. An adhesive strength of 9 GPa was estimated. The failure followed two different stress regimes, one tangential responsible for the wear and the other axial responsible for the film/substrate adhesion. EDS spectra of the scratched region shown complete adhesive failure. Keywords: sliding naation, SiCN thin films, adhesive strength" @default.
- W4328004821 created "2023-03-22" @default.
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- W4328004821 date "2022-01-01" @default.
- W4328004821 modified "2023-10-18" @default.
- W4328004821 title "Failure regions resembling geometrical shapes in sliding naation of Si-C-N thin films used for N/MEMS" @default.
- W4328004821 doi "https://doi.org/10.21883/tpl.2022.08.55113.19132" @default.
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