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- W432811802 abstract "This study deals with the improvement of ultraprecision micromachining technology by devising a tool chucking mechanism. A lathe-type ultraprecision milling machine equipped with an improved pseudo ball end mill as a cutting tool was designed to create tiny parts with nm-order surface roughness. The dimensional accuracy and surface roughness are significantly influenced by the rotational accuracy of the pseudo ball end mills, which are mounted on the spindle using a chucking mechanism. To meet the requirement, a new chucking mechanism was devised as a substitute of a three-jaw-type chuck to improve the setting repeatability of the tool. The new chucking mechanism enables the tool to be rightly positioned within the range of 0.2 μm. As a result, the ultraprecision milling machine equipped with the chucking mechanism and the tool was able to produce a traditional Noh mask on a copper surface of 1 mm in diameter with a surface roughness of 58 nm (p-v). In addition, it was found that the contour line pattern observed on the mask surface was due to a three dimensional cutter mark." @default.
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- W432811802 date "1997-01-01" @default.
- W432811802 modified "2023-09-26" @default.
- W432811802 title "Advanced Three-Dimensional Micromachining by Means of Ultraprecision Milling. 2nd Report. High-Precision Tool Chuch System." @default.
- W432811802 doi "https://doi.org/10.1299/kikaic.63.3634" @default.
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