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- W4328121659 abstract "Abstract Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field." @default.
- W4328121659 created "2023-03-22" @default.
- W4328121659 creator A5016449727 @default.
- W4328121659 creator A5031660185 @default.
- W4328121659 creator A5052015929 @default.
- W4328121659 creator A5053874471 @default.
- W4328121659 creator A5056888417 @default.
- W4328121659 creator A5073609267 @default.
- W4328121659 creator A5077882536 @default.
- W4328121659 creator A5082891689 @default.
- W4328121659 date "2023-03-21" @default.
- W4328121659 modified "2023-10-16" @default.
- W4328121659 title "Microfabrication of functional polyimide films and microstructures for flexible MEMS applications" @default.
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