FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4360952442> ?p ?o ?g. }

• W4360952442 abstract "The progress of miniaturisation in integrated electronics has led to atomic and nanometre-sized dopant devices in silicon. Such structures can be fabricated routinely by hydrogen resist lithography, using various dopants such as phosphorous and arsenic. However, the ability to non-destructively obtain atomic-species-specific images of the final structure, which would be an indispensable tool for building more complex nano-scale devices, such as quantum co-processors, remains an unresolved challenge. Here we exploit X-ray fluorescence to create an element-specific image of As dopants in silicon, with dopant densities in absolute units and a resolution limited by the beam focal size (here $sim1~mu$m), without affecting the device's low temperature electronic properties. The As densities provided by the X-ray data are compared to those derived from Hall effect measurements as well as the standard non-repeatable, scanning tunnelling microscopy and secondary ion mass spectroscopy, techniques. Before and after the X-ray experiments, we also measured the magneto-conductance, dominated by weak localisation, a quantum interference effect extremely sensitive to sample dimensions and disorder. Notwithstanding the $1.5times10^{10}$ Sv ($1.5times10^{16}$ Rad/cm$^{-2}$) exposure of the device to X-rays, all transport data were unchanged to within experimental errors, corresponding to upper bounds of 0.2 Angstroms for the radiation-induced motion of the typical As atom and 3$%$ for the loss of activated, carrier-contributing dopants. With next generation synchrotron radiation sources and more advanced optics, we foresee that it will be possible to obtain X-ray images of single dopant atoms within resolved radii of 5 nm." @default.
• W4360952442 created "2023-03-26" @default.
• W4360952442 creator A5012728722 @default.
• W4360952442 creator A5015182989 @default.
• W4360952442 creator A5016382617 @default.
• W4360952442 creator A5019767799 @default.
• W4360952442 creator A5026809547 @default.
• W4360952442 creator A5032008379 @default.
• W4360952442 creator A5034267456 @default.
• W4360952442 creator A5037466115 @default.
• W4360952442 creator A5037903713 @default.
• W4360952442 creator A5043349273 @default.
• W4360952442 creator A5055307465 @default.
• W4360952442 creator A5055380003 @default.
• W4360952442 creator A5064736162 @default.
• W4360952442 creator A5073110756 @default.
• W4360952442 date "2023-03-25" @default.
• W4360952442 modified "2023-10-14" @default.
• W4360952442 title "Non‐Destructive X‐Ray Imaging of Patterned Delta‐Layer Devices in Silicon" @default.
• W4360952442 cites W1988012386 @default.
• W4360952442 cites W1989416179 @default.
• W4360952442 cites W1996530735 @default.
• W4360952442 cites W1996814327 @default.
• W4360952442 cites W2020369279 @default.
• W4360952442 cites W2023231970 @default.
• W4360952442 cites W2027230913 @default.
• W4360952442 cites W2053849251 @default.
• W4360952442 cites W2056044050 @default.
• W4360952442 cites W2059129432 @default.
• W4360952442 cites W2060848059 @default.
• W4360952442 cites W2061680897 @default.
• W4360952442 cites W2061927092 @default.
• W4360952442 cites W2082347965 @default.
• W4360952442 cites W2116645428 @default.
• W4360952442 cites W2127686923 @default.
• W4360952442 cites W2132352444 @default.
• W4360952442 cites W2152008368 @default.
• W4360952442 cites W2199129937 @default.
• W4360952442 cites W2292538908 @default.
• W4360952442 cites W2468146701 @default.
• W4360952442 cites W2499906541 @default.
• W4360952442 cites W2504806440 @default.
• W4360952442 cites W2564517959 @default.
• W4360952442 cites W2595276417 @default.
• W4360952442 cites W2786898717 @default.
• W4360952442 cites W2890699279 @default.
• W4360952442 cites W2892164352 @default.
• W4360952442 cites W2893184102 @default.
• W4360952442 cites W2893727326 @default.
• W4360952442 cites W2897607471 @default.
• W4360952442 cites W2906392726 @default.
• W4360952442 cites W2952378928 @default.
• W4360952442 cites W2978997998 @default.
• W4360952442 cites W3009597978 @default.
• W4360952442 cites W3021518509 @default.
• W4360952442 cites W3037016622 @default.
• W4360952442 cites W3044998215 @default.
• W4360952442 cites W3137025778 @default.
• W4360952442 cites W3179039646 @default.
• W4360952442 cites W4226054492 @default.
• W4360952442 cites W4283266871 @default.
• W4360952442 doi "https://doi.org/10.1002/aelm.202201212" @default.
• W4360952442 hasPublicationYear "2023" @default.
• W4360952442 type Work @default.
• W4360952442 citedByCount "1" @default.
• W4360952442 countsByYear W43609524422023 @default.
• W4360952442 crossrefType "journal-article" @default.
• W4360952442 hasAuthorship W4360952442A5012728722 @default.
• W4360952442 hasAuthorship W4360952442A5015182989 @default.
• W4360952442 hasAuthorship W4360952442A5016382617 @default.
• W4360952442 hasAuthorship W4360952442A5019767799 @default.
• W4360952442 hasAuthorship W4360952442A5026809547 @default.
• W4360952442 hasAuthorship W4360952442A5032008379 @default.
• W4360952442 hasAuthorship W4360952442A5034267456 @default.
• W4360952442 hasAuthorship W4360952442A5037466115 @default.
• W4360952442 hasAuthorship W4360952442A5037903713 @default.
• W4360952442 hasAuthorship W4360952442A5043349273 @default.
• W4360952442 hasAuthorship W4360952442A5055307465 @default.
• W4360952442 hasAuthorship W4360952442A5055380003 @default.
• W4360952442 hasAuthorship W4360952442A5064736162 @default.
• W4360952442 hasAuthorship W4360952442A5073110756 @default.
• W4360952442 hasBestOaLocation W43609524421 @default.
• W4360952442 hasConcept C120665830 @default.
• W4360952442 hasConcept C121332964 @default.
• W4360952442 hasConcept C171250308 @default.
• W4360952442 hasConcept C191952053 @default.
• W4360952442 hasConcept C192562407 @default.
• W4360952442 hasConcept C49040817 @default.
• W4360952442 hasConcept C544956773 @default.
• W4360952442 hasConcept C57863236 @default.
• W4360952442 hasConcept C6518042 @default.
• W4360952442 hasConceptScore W4360952442C120665830 @default.
• W4360952442 hasConceptScore W4360952442C121332964 @default.
• W4360952442 hasConceptScore W4360952442C171250308 @default.
• W4360952442 hasConceptScore W4360952442C191952053 @default.
• W4360952442 hasConceptScore W4360952442C192562407 @default.
• W4360952442 hasConceptScore W4360952442C49040817 @default.
• W4360952442 hasConceptScore W4360952442C544956773 @default.
• W4360952442 hasConceptScore W4360952442C57863236 @default.
• W4360952442 hasConceptScore W4360952442C6518042 @default.

• next