FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4361001013> ?p ?o ?g. }

• W4361001013 endingPage "18" @default.
• W4361001013 startingPage "1" @default.
• W4361001013 abstract "Background : We report on the fundamental crystallization kinetics of atomic layer deposited (ALD) TiO2 thin films undergoing a post-deposition anneal (PDA) at low temperatures to probe differences in the as-deposited film microstructure. Methods : The system of study is ALD TiO2 thin films prepared from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water at 120 °C, 140 °C and 160 °C followed by ex situ low temperature annealing at temperatures ranging from 140 °C to 220 °C. All as-deposited TiO2 thin films are amorphous by X-ray diffraction (XRD). Post-deposition annealing (PDA) produces large grain anatase crystals, confirmed by XRD and top-view scanning electron microscopy (SEM). A detailed SEM study is performed to quantify the nucleation and growth kinetics by fitting microstructural data to the Johnson-Mehl-Avrami-Kolmogorov (JMAK) equation. Finally, a time-temperature-transformation (TTT) diagram is constructed to summarize the differences in crystallization behavior at different ALD deposition temperatures. Results and conclusions : Fitting microstructural data to the JMAK equation reveals an Avrami exponent close to 3 with continuous nucleation, suggesting two-dimensional, plate-like crystal growth. Applying an Arrhenius relationship to the phase transformation data, the combined activation energy for nucleation and growth is found to be 1.40–1.58 eV atom-1. Nucleation rates are determined, and an Arrhenius relationship is used to calculate the critical Gibbs free energy for nucleation (~1.3–1.4 eV atom-1). As such, nucleation is the rate-limiting step for the amorphous to anatase phase transformation. ALD growth temperature is found to dictate film microstructure with lower deposition temperatures reducing the nucleation rate and leading to larger grain sizes irrespective of PDA conditions. The nucleation rate pre-exponential frequency factor increases with increasing deposition temperature, thereby increasing the likelihood for nucleation. Interestingly, it is this difference in the vibrational modes of the amorphous structure, as indicated by the variation in the nucleation rate pre-exponential frequency factor, that alters the phase transformation rates and not a change in the activation energies for the transformation." @default.
• W4361001013 created "2023-03-30" @default.
• W4361001013 creator A5017126282 @default.
• W4361001013 creator A5033780527 @default.
• W4361001013 creator A5047907417 @default.
• W4361001013 creator A5061802225 @default.
• W4361001013 creator A5079780727 @default.
• W4361001013 creator A5083424047 @default.
• W4361001013 date "2023-03-27" @default.
• W4361001013 modified "2023-10-04" @default.
• W4361001013 title "Transformation kinetics for low temperature post-deposition crystallization of TiO 2 thin films prepared via atomic layer deposition (ALD) from tetrakis(dimethylamino)titanium(IV) (TDMAT) and water" @default.
• W4361001013 cites W1661392474 @default.
• W4361001013 cites W1966075219 @default.
• W4361001013 cites W1966634721 @default.
• W4361001013 cites W1974105848 @default.
• W4361001013 cites W1978184054 @default.
• W4361001013 cites W1978263482 @default.
• W4361001013 cites W1980880762 @default.
• W4361001013 cites W1981900797 @default.
• W4361001013 cites W1987596999 @default.
• W4361001013 cites W1991570229 @default.
• W4361001013 cites W1992094691 @default.
• W4361001013 cites W1993614411 @default.
• W4361001013 cites W1994791985 @default.
• W4361001013 cites W2024878520 @default.
• W4361001013 cites W2024908520 @default.
• W4361001013 cites W2031532798 @default.
• W4361001013 cites W2031598057 @default.
• W4361001013 cites W2032505589 @default.
• W4361001013 cites W2032988145 @default.
• W4361001013 cites W2035931858 @default.
• W4361001013 cites W2038126212 @default.
• W4361001013 cites W2047446391 @default.
• W4361001013 cites W2052953969 @default.
• W4361001013 cites W2056320034 @default.
• W4361001013 cites W2059450000 @default.
• W4361001013 cites W2067634592 @default.
• W4361001013 cites W2069232873 @default.
• W4361001013 cites W2073651843 @default.
• W4361001013 cites W2076358858 @default.
• W4361001013 cites W2088599516 @default.
• W4361001013 cites W2112659143 @default.
• W4361001013 cites W2121697212 @default.
• W4361001013 cites W2313601561 @default.
• W4361001013 cites W2333949144 @default.
• W4361001013 cites W2405821221 @default.
• W4361001013 cites W2507087677 @default.
• W4361001013 cites W2548089883 @default.
• W4361001013 cites W2562944229 @default.
• W4361001013 cites W2589628834 @default.
• W4361001013 cites W2597622466 @default.
• W4361001013 cites W2792266916 @default.
• W4361001013 cites W2806057949 @default.
• W4361001013 cites W2890258988 @default.
• W4361001013 cites W2953124922 @default.
• W4361001013 cites W3001143872 @default.
• W4361001013 cites W3040663987 @default.
• W4361001013 cites W3149354848 @default.
• W4361001013 cites W3205308382 @default.
• W4361001013 cites W383110187 @default.
• W4361001013 cites W4244217106 @default.
• W4361001013 cites W4253789658 @default.
• W4361001013 cites W4281254290 @default.
• W4361001013 cites W4293575059 @default.
• W4361001013 cites W83701371 @default.
• W4361001013 cites W881139031 @default.
• W4361001013 doi "https://doi.org/10.3897/aldj.1.101276" @default.
• W4361001013 hasPublicationYear "2023" @default.
• W4361001013 type Work @default.
• W4361001013 citedByCount "0" @default.
• W4361001013 crossrefType "journal-article" @default.
• W4361001013 hasAuthorship W4361001013A5017126282 @default.
• W4361001013 hasAuthorship W4361001013A5033780527 @default.
• W4361001013 hasAuthorship W4361001013A5047907417 @default.
• W4361001013 hasAuthorship W4361001013A5061802225 @default.
• W4361001013 hasAuthorship W4361001013A5079780727 @default.
• W4361001013 hasAuthorship W4361001013A5083424047 @default.
• W4361001013 hasBestOaLocation W43610010131 @default.
• W4361001013 hasConcept C113196181 @default.
• W4361001013 hasConcept C121332964 @default.
• W4361001013 hasConcept C127413603 @default.
• W4361001013 hasConcept C147789679 @default.
• W4361001013 hasConcept C161790260 @default.
• W4361001013 hasConcept C171250308 @default.
• W4361001013 hasConcept C185592680 @default.
• W4361001013 hasConcept C19067145 @default.
• W4361001013 hasConcept C191897082 @default.
• W4361001013 hasConcept C192562407 @default.
• W4361001013 hasConcept C203036418 @default.
• W4361001013 hasConcept C204774569 @default.
• W4361001013 hasConcept C2777402863 @default.
• W4361001013 hasConcept C2777855556 @default.
• W4361001013 hasConcept C42360764 @default.
• W4361001013 hasConcept C43617362 @default.
• W4361001013 hasConcept C55493867 @default.
• W4361001013 hasConcept C56052488 @default.
• W4361001013 hasConcept C61048295 @default.
• W4361001013 hasConcept C65165184 @default.

• next