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- W4362456452 endingPage "109437" @default.
- W4362456452 startingPage "109437" @default.
- W4362456452 abstract "The laser-induced periodic surface structure (LIPSS) can be induced on the 4H-SiC by femtosecond laser. However, there is some problems exist during the laser process. For example, the debris induced by femtosecond laser ablation dropped on the sample surface. In this study, the femtosecond laser generated the high-spatial-frequency LIPSS (HSFL) on the 4H-SiC surface. The Raman spectrum was used to measure the HSFL, followed by the chemical etching that removed the oxidation layer. The results showed that the Raman intensity of amorphous SiC (a-SiC) is highly correlated to the etching rate of HSFL. In addition, the high-quality periodic structures were generated on 4H-SiC after the chemical etching process. The period is near the low-spatial-frequency LIPSS (LSFL). Two different morphology of structures is observed by transmission electron microscope (TEM). One is no ablation region, and the other region exists a little ablation with ablation depth around 30–50 nm. These two regions are similar to the energy distribution of the surface plasmon polariton." @default.
- W4362456452 created "2023-04-05" @default.
- W4362456452 creator A5015371172 @default.
- W4362456452 creator A5018841307 @default.
- W4362456452 creator A5037165140 @default.
- W4362456452 creator A5043638450 @default.
- W4362456452 creator A5079798371 @default.
- W4362456452 creator A5080294294 @default.
- W4362456452 date "2023-08-01" @default.
- W4362456452 modified "2023-10-04" @default.
- W4362456452 title "High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching" @default.
- W4362456452 cites W1966329716 @default.
- W4362456452 cites W1974000569 @default.
- W4362456452 cites W1974626561 @default.
- W4362456452 cites W1982590561 @default.
- W4362456452 cites W2012454929 @default.
- W4362456452 cites W2054199469 @default.
- W4362456452 cites W2063822356 @default.
- W4362456452 cites W2065231388 @default.
- W4362456452 cites W2115582732 @default.
- W4362456452 cites W2170557560 @default.
- W4362456452 cites W2310496795 @default.
- W4362456452 cites W2310769524 @default.
- W4362456452 cites W2360791792 @default.
- W4362456452 cites W2580563717 @default.
- W4362456452 cites W2782067022 @default.
- W4362456452 cites W2947466616 @default.
- W4362456452 cites W2999424363 @default.
- W4362456452 cites W3048272827 @default.
- W4362456452 cites W3089545072 @default.
- W4362456452 cites W3185184480 @default.
- W4362456452 cites W4214524386 @default.
- W4362456452 cites W4223965822 @default.
- W4362456452 doi "https://doi.org/10.1016/j.optlastec.2023.109437" @default.
- W4362456452 hasPublicationYear "2023" @default.
- W4362456452 type Work @default.
- W4362456452 citedByCount "2" @default.
- W4362456452 countsByYear W43624564522023 @default.
- W4362456452 crossrefType "journal-article" @default.
- W4362456452 hasAuthorship W4362456452A5015371172 @default.
- W4362456452 hasAuthorship W4362456452A5018841307 @default.
- W4362456452 hasAuthorship W4362456452A5037165140 @default.
- W4362456452 hasAuthorship W4362456452A5043638450 @default.
- W4362456452 hasAuthorship W4362456452A5079798371 @default.
- W4362456452 hasAuthorship W4362456452A5080294294 @default.
- W4362456452 hasConcept C100460472 @default.
- W4362456452 hasConcept C120665830 @default.
- W4362456452 hasConcept C121332964 @default.
- W4362456452 hasConcept C127413603 @default.
- W4362456452 hasConcept C146978453 @default.
- W4362456452 hasConcept C167735695 @default.
- W4362456452 hasConcept C171250308 @default.
- W4362456452 hasConcept C178790620 @default.
- W4362456452 hasConcept C185592680 @default.
- W4362456452 hasConcept C192562407 @default.
- W4362456452 hasConcept C2778902805 @default.
- W4362456452 hasConcept C2779188808 @default.
- W4362456452 hasConcept C2779227376 @default.
- W4362456452 hasConcept C33220542 @default.
- W4362456452 hasConcept C40003534 @default.
- W4362456452 hasConcept C49040817 @default.
- W4362456452 hasConcept C520434653 @default.
- W4362456452 hasConcept C56052488 @default.
- W4362456452 hasConceptScore W4362456452C100460472 @default.
- W4362456452 hasConceptScore W4362456452C120665830 @default.
- W4362456452 hasConceptScore W4362456452C121332964 @default.
- W4362456452 hasConceptScore W4362456452C127413603 @default.
- W4362456452 hasConceptScore W4362456452C146978453 @default.
- W4362456452 hasConceptScore W4362456452C167735695 @default.
- W4362456452 hasConceptScore W4362456452C171250308 @default.
- W4362456452 hasConceptScore W4362456452C178790620 @default.
- W4362456452 hasConceptScore W4362456452C185592680 @default.
- W4362456452 hasConceptScore W4362456452C192562407 @default.
- W4362456452 hasConceptScore W4362456452C2778902805 @default.
- W4362456452 hasConceptScore W4362456452C2779188808 @default.
- W4362456452 hasConceptScore W4362456452C2779227376 @default.
- W4362456452 hasConceptScore W4362456452C33220542 @default.
- W4362456452 hasConceptScore W4362456452C40003534 @default.
- W4362456452 hasConceptScore W4362456452C49040817 @default.
- W4362456452 hasConceptScore W4362456452C520434653 @default.
- W4362456452 hasConceptScore W4362456452C56052488 @default.
- W4362456452 hasLocation W43624564521 @default.
- W4362456452 hasOpenAccess W4362456452 @default.
- W4362456452 hasPrimaryLocation W43624564521 @default.
- W4362456452 hasRelatedWork W1971453396 @default.
- W4362456452 hasRelatedWork W2012930172 @default.
- W4362456452 hasRelatedWork W2020276966 @default.
- W4362456452 hasRelatedWork W2029225928 @default.
- W4362456452 hasRelatedWork W2054610802 @default.
- W4362456452 hasRelatedWork W2057498823 @default.
- W4362456452 hasRelatedWork W2359597734 @default.
- W4362456452 hasRelatedWork W2373247025 @default.
- W4362456452 hasRelatedWork W2560330190 @default.
- W4362456452 hasRelatedWork W3177751695 @default.
- W4362456452 hasVolume "163" @default.
- W4362456452 isParatext "false" @default.
- W4362456452 isRetracted "false" @default.
- W4362456452 workType "article" @default.