Matches in SemOpenAlex for { <https://semopenalex.org/work/W4364361051> ?p ?o ?g. }
- W4364361051 endingPage "108374" @default.
- W4364361051 startingPage "108374" @default.
- W4364361051 abstract "This study presents a new method of in-process plasma-assisted etching (PaE) integrated with low-pressure polishing of lutetium oxide with high efficiency and without subsurface damage (SSD). The necessity of integrated low-pressure polishing is demonstrated through a quantum chemistry simulation. An improved Deal–Grove model for plasma treatment is established to predict the modification behavior. A modification rate of 136 nm/h can be obtained by simultaneously optimizing the plasma process. An atomically flat and SSD-free surface with a surface roughness in Sa of 0.14 nm is accomplished. The overall processing time is decreased to half the time of low-pressure slurry polishing. The new method is based on the OH* irradiation of lutetium oxide and the conversion of lutetium oxide into hydroxide, which rapidly reacts with 25% sulfuric acid droplets. The rapid planarization of the surface is then quickly realized by short low-pressure polishing. Finally, the in-process PaE quickly removes the SSD caused by low-pressure polishing. Aberration-corrected transmission electron microscopy of machined surfaces reveals the removal of the mechanically induced damage. The study shows that the new method has great potential as an environment-friendly processing technique in SSD-free finishing." @default.
- W4364361051 created "2023-04-12" @default.
- W4364361051 creator A5020141096 @default.
- W4364361051 creator A5025713308 @default.
- W4364361051 creator A5041449298 @default.
- W4364361051 creator A5077389302 @default.
- W4364361051 date "2023-08-01" @default.
- W4364361051 modified "2023-10-18" @default.
- W4364361051 title "Atomic and close-to-atomic scale polishing of Lu2O3 by plasma-assisted etching" @default.
- W4364361051 cites W1965511905 @default.
- W4364361051 cites W1968224167 @default.
- W4364361051 cites W1978309323 @default.
- W4364361051 cites W1982356449 @default.
- W4364361051 cites W2005208659 @default.
- W4364361051 cites W2021668518 @default.
- W4364361051 cites W2028642658 @default.
- W4364361051 cites W2049079467 @default.
- W4364361051 cites W2054435657 @default.
- W4364361051 cites W2069086427 @default.
- W4364361051 cites W2076549860 @default.
- W4364361051 cites W2081137713 @default.
- W4364361051 cites W2093914900 @default.
- W4364361051 cites W2114544586 @default.
- W4364361051 cites W2202344073 @default.
- W4364361051 cites W2251872687 @default.
- W4364361051 cites W2323281878 @default.
- W4364361051 cites W2331267223 @default.
- W4364361051 cites W2409797677 @default.
- W4364361051 cites W2556006172 @default.
- W4364361051 cites W2616179959 @default.
- W4364361051 cites W2621706925 @default.
- W4364361051 cites W2777760228 @default.
- W4364361051 cites W2793124523 @default.
- W4364361051 cites W2888570736 @default.
- W4364361051 cites W2913294271 @default.
- W4364361051 cites W2919617834 @default.
- W4364361051 cites W2920476650 @default.
- W4364361051 cites W2933527860 @default.
- W4364361051 cites W2935880854 @default.
- W4364361051 cites W2937510908 @default.
- W4364361051 cites W2949941527 @default.
- W4364361051 cites W2980983010 @default.
- W4364361051 cites W2999631702 @default.
- W4364361051 cites W3009325418 @default.
- W4364361051 cites W3015192322 @default.
- W4364361051 cites W3027823076 @default.
- W4364361051 cites W3037550891 @default.
- W4364361051 cites W3043422450 @default.
- W4364361051 cites W3048715957 @default.
- W4364361051 cites W3087759081 @default.
- W4364361051 cites W3089328941 @default.
- W4364361051 cites W3097064213 @default.
- W4364361051 cites W3097965580 @default.
- W4364361051 cites W3118290825 @default.
- W4364361051 cites W3128203935 @default.
- W4364361051 cites W3130502881 @default.
- W4364361051 cites W3134312782 @default.
- W4364361051 cites W3145401137 @default.
- W4364361051 cites W3155963720 @default.
- W4364361051 cites W3162665027 @default.
- W4364361051 cites W3164886822 @default.
- W4364361051 cites W3168663194 @default.
- W4364361051 cites W3170188366 @default.
- W4364361051 cites W3170809731 @default.
- W4364361051 cites W3193496845 @default.
- W4364361051 cites W3208696415 @default.
- W4364361051 cites W3209485059 @default.
- W4364361051 cites W3209523170 @default.
- W4364361051 cites W3211549887 @default.
- W4364361051 cites W4220830171 @default.
- W4364361051 cites W4223502380 @default.
- W4364361051 cites W4226268400 @default.
- W4364361051 cites W4280498484 @default.
- W4364361051 cites W4281622311 @default.
- W4364361051 cites W4282935885 @default.
- W4364361051 cites W4286250185 @default.
- W4364361051 cites W4289731520 @default.
- W4364361051 doi "https://doi.org/10.1016/j.ijmecsci.2023.108374" @default.
- W4364361051 hasPublicationYear "2023" @default.
- W4364361051 type Work @default.
- W4364361051 citedByCount "0" @default.
- W4364361051 crossrefType "journal-article" @default.
- W4364361051 hasAuthorship W4364361051A5020141096 @default.
- W4364361051 hasAuthorship W4364361051A5025713308 @default.
- W4364361051 hasAuthorship W4364361051A5041449298 @default.
- W4364361051 hasAuthorship W4364361051A5077389302 @default.
- W4364361051 hasConcept C100460472 @default.
- W4364361051 hasConcept C107365816 @default.
- W4364361051 hasConcept C115537861 @default.
- W4364361051 hasConcept C127413603 @default.
- W4364361051 hasConcept C130472188 @default.
- W4364361051 hasConcept C138113353 @default.
- W4364361051 hasConcept C159985019 @default.
- W4364361051 hasConcept C180088628 @default.
- W4364361051 hasConcept C191897082 @default.
- W4364361051 hasConcept C192562407 @default.
- W4364361051 hasConcept C2779227376 @default.
- W4364361051 hasConcept C2779851234 @default.