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- W4366114478 abstract "Electron, positive and negative ion kinetics and their densities <i>n<sub>e</sub></i>, <i>n<sub>p</sub></i>, <i>n<sub>n</sub></i> profiles forming in electronegative plasma of narrow pulse-periodic discharge, when a pulse duration <i>t<sub>i</sub></i> less than time of an establishment of stationary density profiles <i>t<sub>sp</sub></i>, are discussed. Densities <i>n<sub>e</sub></i>, <i>n<sub>p</sub></i>, <i>n<sub>n</sub></i> increasing in an active phase and two-stage plasma decay in pauses between pulses in the case of when <i>n<sub>n</sub>(t<sub>i</sub>)</i> > <i>n<sub>e</sub>(t<sub>i</sub>)</i> are analyzed. It is draw attention that the charged particle kinetics under consideration both during discharge pulses and in pauses between them <i>n<sub>e</sub></i>, <i>n<sub>p</sub></i>, <i>n<sub>n</sub></i> profiles can be supposed, as similar and not changing in time. Bessel type of <i>n<sub>e</sub></i>, <i>n<sub>p</sub></i>, <i>n<sub>n</sub></i> profiles in an oxygen plasma for <i>t<sub>i</sub> < t<sub>sp</sub></i> are confirmed in experiment." @default.
- W4366114478 created "2023-04-19" @default.
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- W4366114478 date "2023-01-01" @default.
- W4366114478 modified "2023-09-30" @default.
- W4366114478 title "CHARGEDPARTICLE DENSITYPROFILES IN LOWPRESSURE PULSE DISCHARGEOF ELECTRONEGATIVE GASES" @default.
- W4366114478 doi "https://doi.org/10.1615/itppc-1996.390" @default.
- W4366114478 hasPublicationYear "2023" @default.
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