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- W4366169640 abstract "Superconducting detectors have become essential devices for high-performance single-photon counting over a wide wavelength range with excellent time resolution. Detector fabrication typically relies on resist-based lithography processes, which can limit possibilities for device integration, e.g., on unconventional substrates. Here, we demonstrate a resist-free fabrication route for realizing superconducting nanowire single-photon detectors based on focused electron beam-induced deposition. Utilizing direct writing of a Pt–C mask, we achieved nanowire meanders with linewidths below 100 nm, operated them as superconducting devices for the detection of visible and near-infrared photons, and showed detector integration on side-polished optical fibers. Being compatible with device fabrication on curved irregular surfaces, our approach could enable superconducting detector integration in complex configurations." @default.
- W4366169640 created "2023-04-19" @default.
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- W4366169640 date "2023-04-01" @default.
- W4366169640 modified "2023-10-14" @default.
- W4366169640 title "Superconducting single-photon detectors fabricated via a focused electron beam-induced deposition process" @default.
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- W4366169640 doi "https://doi.org/10.1063/5.0080674" @default.
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