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- W4366378714 abstract "Hybrid bonded silicon nitride thin-film lithium niobate (TFLN) Mach-Zehnder modulators (MZMs) at 1310 nm were designed with metal coplanar waveguide electrodes buried in the silicon-on-insulator (SOI) chip. The MZM devices showed greatly improved performance compared to earlier devices of a similar design, and similar performance to comparable MZM devices with gold electrodes made on top of the TFLN layer. Both devices achieve a 3-dB electro-optic bandwidth greater than 110 GHz and voltage-driven optical extinction ratios greater than 28 dB. Half-wave voltage-length products ( <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$text{V}pi text{L}$ </tex-math></inline-formula> ) of 2.8 and 2.5 <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$text{V}cdot $ </tex-math></inline-formula> cm were measured for the 0.5 and 0.4 cm long buried metal and top gold electrode MZMs, respectively." @default.
- W4366378714 created "2023-04-21" @default.
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- W4366378714 date "2023-06-01" @default.
- W4366378714 modified "2023-10-11" @default.
- W4366378714 title "Buried-Electrode Hybrid Bonded Thin-Film Lithium Niobate Electro-Optic Mach-Zehnder Modulators" @default.
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- W4366378714 doi "https://doi.org/10.1109/lpt.2023.3268605" @default.
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