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- W4366978495 abstract "This paper reports on the design, simulation and characterization of a high-Q centrally-anchored piezoelectrical AlN-on-silicon MEMS resonator for real-time clock (RTC) application in a wide temperature range. Using electrostatic tuning for temperature compensation decoupled from resonator transduction, this work introduces a new robust structural resonator design at 496kHz with a stable motional resistance and a substantially large tuning range of 12,000ppm to compensate for frequency variations due to process non-idealities and operation in a wide temperature range of up to 500°C." @default.
- W4366978495 created "2023-04-27" @default.
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- W4366978495 date "2023-03-28" @default.
- W4366978495 modified "2023-09-30" @default.
- W4366978495 title "A Centrally-Anchored High-Q Tunable Piezoelectric MEMS Resonators FOR Wide Temperature Range RTC" @default.
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- W4366978495 doi "https://doi.org/10.1109/inertial56358.2023.10103940" @default.
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