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- W4366978620 abstract "Coriolis vibratory gyroscope drive amplitude of 16 <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$upmumathrm{m}$</tex> is demonstrated with <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$+30$</tex> ppm frequency shift nonlinearity. Here, MEMS quadruple mass gyroscope (QMG) mechanical flexures are specifically designed to separate spurious modes without affecting linear operation of gyroscope drive over large amplitudes. A simulated frequency change of <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$+480$</tex> ppm was initially predicted, however, when electrostatically driven at large amplitudes comb drive and sense tips begin to introduce spring softening reducing nonlinearity to <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$+30$</tex> ppm. Careful consideration was also taken to electrostatically tune as-fabricated frequency mismatch without further exacerbating nonlinearity. Angle random walk (ARW) versus drive amplitude is plotted with a demonstrated <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$8times$</tex> improvement compared to similar quadruple mass gyroscopes." @default.
- W4366978620 created "2023-04-27" @default.
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- W4366978620 date "2023-03-28" @default.
- W4366978620 modified "2023-09-30" @default.
- W4366978620 title "Large Amplitude Linear Drive Quadruple Mass Gyroscope" @default.
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- W4366978620 doi "https://doi.org/10.1109/inertial56358.2023.10103988" @default.
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