Matches in SemOpenAlex for { <https://semopenalex.org/work/W4366991725> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W4366991725 abstract "Different from traditional lithography, metal material with high absorptivity and high reflectivity is introduced into plasmonic lithography technology. In particular, a silver/photo resist/silver film stack can form a Fabry-Perot (F-P) resonator structure, which can greatly change the behavior of the light reflection and transmission. Since the silver layer has a strong absorption ability to the alignment probe light with a wavelength of 532 or 633 nm, the quality of the alignment signal is seriously affected. In this paper, a thin film Fourier transfer model is established to quantitatively calculate the amplitude and phase information of the diffraction light with different orders. The results show that the diffraction optical power can be enhanced by the thickness optimization of all film stacks, and the maximum wafer quality (normalized diffraction efficiency) can be increased to 25.7%. The mechanism analysis of alignment signal enhancement is based on the F-P resonator phase oscillation amplification effect. However, it can also bring the reverse of both the power and phase for the alignment probe signal when the thickness fluctuation of the F-P resonator exists, which will be a great challenge for through-the-mask moiré fringe alignment technology. To obtain the optical power distribution of the structure surface and image of moiré fringes, a transfer matrix method is given to point-by-point calculate the incidence and reflection of the probe light in the vertical direction. The finite-difference time-domain method is also used to demonstrate alignment performance. It is proved that the subtle fluctuation of the photoresist thickness can make a huge difference to moiré fringes. A balance between the diffraction efficiency and process robustness can be achieved for plasmonic lithographic alignment technology by controlling the thickness range of the F-P resonator structure. In addition, the metal-insulator-metal structure has excellent thickness sensitivity and is applicable to optical signal detection and material property monitoring." @default.
- W4366991725 created "2023-04-27" @default.
- W4366991725 creator A5008918891 @default.
- W4366991725 creator A5010234425 @default.
- W4366991725 creator A5017385371 @default.
- W4366991725 creator A5053683203 @default.
- W4366991725 creator A5086894190 @default.
- W4366991725 creator A5088640614 @default.
- W4366991725 date "2023-04-25" @default.
- W4366991725 modified "2023-09-29" @default.
- W4366991725 title "A balance between diffraction efficiency and process robustness for plasmonic lithographic alignment technology considering Fabry-Perot resonator effect" @default.
- W4366991725 doi "https://doi.org/10.1364/ao.487682" @default.
- W4366991725 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/37706692" @default.
- W4366991725 hasPublicationYear "2023" @default.
- W4366991725 type Work @default.
- W4366991725 citedByCount "0" @default.
- W4366991725 crossrefType "journal-article" @default.
- W4366991725 hasAuthorship W4366991725A5008918891 @default.
- W4366991725 hasAuthorship W4366991725A5010234425 @default.
- W4366991725 hasAuthorship W4366991725A5017385371 @default.
- W4366991725 hasAuthorship W4366991725A5053683203 @default.
- W4366991725 hasAuthorship W4366991725A5086894190 @default.
- W4366991725 hasAuthorship W4366991725A5088640614 @default.
- W4366991725 hasConcept C110879396 @default.
- W4366991725 hasConcept C120665830 @default.
- W4366991725 hasConcept C121332964 @default.
- W4366991725 hasConcept C136676167 @default.
- W4366991725 hasConcept C169268690 @default.
- W4366991725 hasConcept C192562407 @default.
- W4366991725 hasConcept C204223013 @default.
- W4366991725 hasConcept C207114421 @default.
- W4366991725 hasConcept C49040817 @default.
- W4366991725 hasConcept C6260449 @default.
- W4366991725 hasConcept C97126364 @default.
- W4366991725 hasConceptScore W4366991725C110879396 @default.
- W4366991725 hasConceptScore W4366991725C120665830 @default.
- W4366991725 hasConceptScore W4366991725C121332964 @default.
- W4366991725 hasConceptScore W4366991725C136676167 @default.
- W4366991725 hasConceptScore W4366991725C169268690 @default.
- W4366991725 hasConceptScore W4366991725C192562407 @default.
- W4366991725 hasConceptScore W4366991725C204223013 @default.
- W4366991725 hasConceptScore W4366991725C207114421 @default.
- W4366991725 hasConceptScore W4366991725C49040817 @default.
- W4366991725 hasConceptScore W4366991725C6260449 @default.
- W4366991725 hasConceptScore W4366991725C97126364 @default.
- W4366991725 hasLocation W43669917251 @default.
- W4366991725 hasLocation W43669917252 @default.
- W4366991725 hasOpenAccess W4366991725 @default.
- W4366991725 hasPrimaryLocation W43669917251 @default.
- W4366991725 hasRelatedWork W1884158221 @default.
- W4366991725 hasRelatedWork W2005200026 @default.
- W4366991725 hasRelatedWork W2014991880 @default.
- W4366991725 hasRelatedWork W2049876152 @default.
- W4366991725 hasRelatedWork W2051731380 @default.
- W4366991725 hasRelatedWork W2054640396 @default.
- W4366991725 hasRelatedWork W2058566321 @default.
- W4366991725 hasRelatedWork W2766394785 @default.
- W4366991725 hasRelatedWork W4226411129 @default.
- W4366991725 hasRelatedWork W4237934814 @default.
- W4366991725 isParatext "false" @default.
- W4366991725 isRetracted "false" @default.
- W4366991725 workType "article" @default.