Matches in SemOpenAlex for { <https://semopenalex.org/work/W4367042081> ?p ?o ?g. }
- W4367042081 endingPage "17364" @default.
- W4367042081 startingPage "17364" @default.
- W4367042081 abstract "Laser beam figuring (LBF), as a processing technology for ultra-precision figuring, is expected to be a key technology for further improving optics performance. To the best of our knowledge, we firstly demonstrated CO2 LBF for full-spatial-frequency error convergence at negligible stress. We found that controlling the subsidence and surface smoothing caused by material densification and melt under specific parameters range is an effective way to ensure both form error and roughness. Besides, an innovative densi-melting effect is further proposed to reveal the physical mechanism and guide the nano-precision figuring control, and the simulated results at different pulse durations fit well with the experiment results. Plus, to suppress the laser scanning ripples (mid-spatial-frequency (MSF) error) and reduce the control data volume, a clustered overlapping processing technology is proposed, where the laser processing in each sub-region is regarded as tool influence function (TIF). Through the overlapping control of TIF figuring depth, we achieved LBF experiments for the form error root mean square (RMS) reduced from 0.009λ to 0.003λ (λ=632.8 nm) without destroying microscale roughness (0.447 nm to 0.453 nm) and nanoscale roughness (0.290 nm to 0.269 nm). The establishment of the densi-melting effect and the clustered overlapping processing technology prove that LBF provides a new high-precision, low-cost manufacturing method for optics." @default.
- W4367042081 created "2023-04-27" @default.
- W4367042081 creator A5003603098 @default.
- W4367042081 creator A5008457477 @default.
- W4367042081 creator A5017359190 @default.
- W4367042081 creator A5021933847 @default.
- W4367042081 creator A5053275663 @default.
- W4367042081 creator A5058309780 @default.
- W4367042081 creator A5064658433 @default.
- W4367042081 date "2023-05-08" @default.
- W4367042081 modified "2023-09-25" @default.
- W4367042081 title "Densi-melting effect for ultra-precision laser beam figuring with clustered overlapping technology at full-spatial-frequency" @default.
- W4367042081 cites W1764403790 @default.
- W4367042081 cites W1983473133 @default.
- W4367042081 cites W1992576997 @default.
- W4367042081 cites W1998719250 @default.
- W4367042081 cites W2012854819 @default.
- W4367042081 cites W2031598767 @default.
- W4367042081 cites W2037906463 @default.
- W4367042081 cites W2042515308 @default.
- W4367042081 cites W2045608287 @default.
- W4367042081 cites W2047157287 @default.
- W4367042081 cites W2074886098 @default.
- W4367042081 cites W2077203357 @default.
- W4367042081 cites W2077333490 @default.
- W4367042081 cites W2087133352 @default.
- W4367042081 cites W2128997946 @default.
- W4367042081 cites W2134058941 @default.
- W4367042081 cites W2211093548 @default.
- W4367042081 cites W2298778284 @default.
- W4367042081 cites W2410311827 @default.
- W4367042081 cites W2503212350 @default.
- W4367042081 cites W2584462192 @default.
- W4367042081 cites W2896620458 @default.
- W4367042081 cites W2900779622 @default.
- W4367042081 cites W2959515979 @default.
- W4367042081 cites W2973618473 @default.
- W4367042081 cites W3000176315 @default.
- W4367042081 cites W3143196192 @default.
- W4367042081 cites W3212590594 @default.
- W4367042081 cites W4220776252 @default.
- W4367042081 cites W4283324877 @default.
- W4367042081 doi "https://doi.org/10.1364/oe.492499" @default.
- W4367042081 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/37381473" @default.
- W4367042081 hasPublicationYear "2023" @default.
- W4367042081 type Work @default.
- W4367042081 citedByCount "0" @default.
- W4367042081 crossrefType "journal-article" @default.
- W4367042081 hasAuthorship W4367042081A5003603098 @default.
- W4367042081 hasAuthorship W4367042081A5008457477 @default.
- W4367042081 hasAuthorship W4367042081A5017359190 @default.
- W4367042081 hasAuthorship W4367042081A5021933847 @default.
- W4367042081 hasAuthorship W4367042081A5053275663 @default.
- W4367042081 hasAuthorship W4367042081A5058309780 @default.
- W4367042081 hasAuthorship W4367042081A5064658433 @default.
- W4367042081 hasBestOaLocation W43670420811 @default.
- W4367042081 hasConcept C100921725 @default.
- W4367042081 hasConcept C107365816 @default.
- W4367042081 hasConcept C120665830 @default.
- W4367042081 hasConcept C121332964 @default.
- W4367042081 hasConcept C145420912 @default.
- W4367042081 hasConcept C159985019 @default.
- W4367042081 hasConcept C179428855 @default.
- W4367042081 hasConcept C192562407 @default.
- W4367042081 hasConcept C2775988915 @default.
- W4367042081 hasConcept C31972630 @default.
- W4367042081 hasConcept C33923547 @default.
- W4367042081 hasConcept C3770464 @default.
- W4367042081 hasConcept C41008148 @default.
- W4367042081 hasConcept C520434653 @default.
- W4367042081 hasConcept C62520636 @default.
- W4367042081 hasConcept C71039073 @default.
- W4367042081 hasConcept C71907059 @default.
- W4367042081 hasConceptScore W4367042081C100921725 @default.
- W4367042081 hasConceptScore W4367042081C107365816 @default.
- W4367042081 hasConceptScore W4367042081C120665830 @default.
- W4367042081 hasConceptScore W4367042081C121332964 @default.
- W4367042081 hasConceptScore W4367042081C145420912 @default.
- W4367042081 hasConceptScore W4367042081C159985019 @default.
- W4367042081 hasConceptScore W4367042081C179428855 @default.
- W4367042081 hasConceptScore W4367042081C192562407 @default.
- W4367042081 hasConceptScore W4367042081C2775988915 @default.
- W4367042081 hasConceptScore W4367042081C31972630 @default.
- W4367042081 hasConceptScore W4367042081C33923547 @default.
- W4367042081 hasConceptScore W4367042081C3770464 @default.
- W4367042081 hasConceptScore W4367042081C41008148 @default.
- W4367042081 hasConceptScore W4367042081C520434653 @default.
- W4367042081 hasConceptScore W4367042081C62520636 @default.
- W4367042081 hasConceptScore W4367042081C71039073 @default.
- W4367042081 hasConceptScore W4367042081C71907059 @default.
- W4367042081 hasFunder F4320309612 @default.
- W4367042081 hasFunder F4320321001 @default.
- W4367042081 hasFunder F4320335777 @default.
- W4367042081 hasIssue "11" @default.
- W4367042081 hasLocation W43670420811 @default.
- W4367042081 hasLocation W43670420812 @default.
- W4367042081 hasOpenAccess W4367042081 @default.
- W4367042081 hasPrimaryLocation W43670420811 @default.