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- W4367044034 abstract "In this work, we develop an anneal-free back-end-of-line (BEOL) process for ferroelectric hafnium zirconium oxide (HZO)/indium gallium zinc oxide (IGZO)-based ferroelectric field-effect transistor (FeFET), suitable for in-memory computing. The novel anneal-free BEOL FeFET presented in this work stunningly achieves a competitive performance under a record-low thermal budget. Ultra-low subthreshold swing (SS) of 66.2 mV/dec, large on/off current ratio <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$(mathrm{I}_{text{ON}}/mathrm{I}_{text{OFF}})$</tex> of <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$> 10^{7}$</tex> , large memory window (MW) of <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$> 1.7$</tex> V, high endurance of <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>$> 10^{7}$</tex> cycles without significant degradation are obtained." @default.
- W4367044034 created "2023-04-27" @default.
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- W4367044034 date "2023-03-07" @default.
- W4367044034 modified "2023-10-16" @default.
- W4367044034 title "Back-End-of-Line-Compatible Anneal-Free Ferroelectric Field-Effect Transistor" @default.
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- W4367044034 doi "https://doi.org/10.1109/edtm55494.2023.10103049" @default.
- W4367044034 hasPublicationYear "2023" @default.
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