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• W4367138788 abstract "Abstract A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The Materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail." @default.
• W4367138788 created "2023-04-28" @default.
• W4367138788 creator A5053190215 @default.
• W4367138788 date "1997-09-01" @default.
• W4367138788 modified "2023-10-16" @default.
• W4367138788 title "Piezoelectric thin films for mems" @default.
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• W4367138788 doi "https://doi.org/10.1080/10584589708013004" @default.
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