Matches in SemOpenAlex for { <https://semopenalex.org/work/W4367138788> ?p ?o ?g. }
- W4367138788 endingPage "307" @default.
- W4367138788 startingPage "297" @default.
- W4367138788 abstract "Abstract A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The Materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail." @default.
- W4367138788 created "2023-04-28" @default.
- W4367138788 creator A5053190215 @default.
- W4367138788 date "1997-09-01" @default.
- W4367138788 modified "2023-10-16" @default.
- W4367138788 title "Piezoelectric thin films for mems" @default.
- W4367138788 cites W1805452493 @default.
- W4367138788 cites W1969682132 @default.
- W4367138788 cites W1970061115 @default.
- W4367138788 cites W1979557332 @default.
- W4367138788 cites W1990544299 @default.
- W4367138788 cites W2015593613 @default.
- W4367138788 cites W2018799812 @default.
- W4367138788 cites W2020062736 @default.
- W4367138788 cites W2046104316 @default.
- W4367138788 cites W2059327786 @default.
- W4367138788 cites W2066120182 @default.
- W4367138788 cites W2074461695 @default.
- W4367138788 cites W2074869505 @default.
- W4367138788 cites W2080782931 @default.
- W4367138788 cites W2081257707 @default.
- W4367138788 cites W2082940317 @default.
- W4367138788 cites W2085457352 @default.
- W4367138788 cites W2144037967 @default.
- W4367138788 cites W2146089412 @default.
- W4367138788 cites W2176518890 @default.
- W4367138788 cites W2327268050 @default.
- W4367138788 cites W2550472276 @default.
- W4367138788 cites W2067065700 @default.
- W4367138788 doi "https://doi.org/10.1080/10584589708013004" @default.
- W4367138788 hasPublicationYear "1997" @default.
- W4367138788 type Work @default.
- W4367138788 citedByCount "104" @default.
- W4367138788 countsByYear W43671387882012 @default.
- W4367138788 countsByYear W43671387882013 @default.
- W4367138788 countsByYear W43671387882014 @default.
- W4367138788 countsByYear W43671387882015 @default.
- W4367138788 countsByYear W43671387882016 @default.
- W4367138788 countsByYear W43671387882017 @default.
- W4367138788 countsByYear W43671387882018 @default.
- W4367138788 countsByYear W43671387882019 @default.
- W4367138788 countsByYear W43671387882020 @default.
- W4367138788 countsByYear W43671387882021 @default.
- W4367138788 countsByYear W43671387882022 @default.
- W4367138788 countsByYear W43671387882023 @default.
- W4367138788 crossrefType "journal-article" @default.
- W4367138788 hasAuthorship W4367138788A5053190215 @default.
- W4367138788 hasConcept C100082104 @default.
- W4367138788 hasConcept C121332964 @default.
- W4367138788 hasConcept C135405054 @default.
- W4367138788 hasConcept C151730666 @default.
- W4367138788 hasConcept C159985019 @default.
- W4367138788 hasConcept C171250308 @default.
- W4367138788 hasConcept C19067145 @default.
- W4367138788 hasConcept C192562407 @default.
- W4367138788 hasConcept C24890656 @default.
- W4367138788 hasConcept C2816523 @default.
- W4367138788 hasConcept C37977207 @default.
- W4367138788 hasConcept C49040817 @default.
- W4367138788 hasConcept C544956773 @default.
- W4367138788 hasConcept C64297162 @default.
- W4367138788 hasConcept C81288441 @default.
- W4367138788 hasConcept C86194701 @default.
- W4367138788 hasConcept C86803240 @default.
- W4367138788 hasConcept C91397564 @default.
- W4367138788 hasConcept C97126364 @default.
- W4367138788 hasConceptScore W4367138788C100082104 @default.
- W4367138788 hasConceptScore W4367138788C121332964 @default.
- W4367138788 hasConceptScore W4367138788C135405054 @default.
- W4367138788 hasConceptScore W4367138788C151730666 @default.
- W4367138788 hasConceptScore W4367138788C159985019 @default.
- W4367138788 hasConceptScore W4367138788C171250308 @default.
- W4367138788 hasConceptScore W4367138788C19067145 @default.
- W4367138788 hasConceptScore W4367138788C192562407 @default.
- W4367138788 hasConceptScore W4367138788C24890656 @default.
- W4367138788 hasConceptScore W4367138788C2816523 @default.
- W4367138788 hasConceptScore W4367138788C37977207 @default.
- W4367138788 hasConceptScore W4367138788C49040817 @default.
- W4367138788 hasConceptScore W4367138788C544956773 @default.
- W4367138788 hasConceptScore W4367138788C64297162 @default.
- W4367138788 hasConceptScore W4367138788C81288441 @default.
- W4367138788 hasConceptScore W4367138788C86194701 @default.
- W4367138788 hasConceptScore W4367138788C86803240 @default.
- W4367138788 hasConceptScore W4367138788C91397564 @default.
- W4367138788 hasConceptScore W4367138788C97126364 @default.
- W4367138788 hasIssue "1-4" @default.
- W4367138788 hasLocation W43671387881 @default.
- W4367138788 hasOpenAccess W4367138788 @default.
- W4367138788 hasPrimaryLocation W43671387881 @default.
- W4367138788 hasRelatedWork W1982792222 @default.
- W4367138788 hasRelatedWork W2349990665 @default.
- W4367138788 hasRelatedWork W2374711432 @default.
- W4367138788 hasRelatedWork W2389505578 @default.
- W4367138788 hasRelatedWork W2416587712 @default.
- W4367138788 hasRelatedWork W2912807936 @default.
- W4367138788 hasRelatedWork W2925680864 @default.
- W4367138788 hasRelatedWork W4245477257 @default.
- W4367138788 hasRelatedWork W4367138788 @default.