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- W4367173503 abstract "β-Ga2O3 is attracting considerable attention for applications in power electronics and deep ultraviolet (DUV) optoelectronics owing to the ultra-wide bandgap of 4.85 eV and amendable n-type conductivity. In this work, we report the achievement of Si-doped β-Ga2O3 (Si:β-Ga2O3) thin films grown on vicinal α-Al2O3 (0001) substrates with high electrical conductivity and DUV transparency of promising potential as transparent electrodes. The use of Al2O3 substrates with miscut angles promotes step-flow growth mode, leading to substantial improvement of crystalline quality and electrical properties of the Si:β-Ga2O3 films. A high conductivity of 37 S·cm−1 and average DUV transparency of 85% have been achieved for 0.5% Si-doped film grown on a 6° miscut substrate. High-resolution x-ray and ultraviolet photoemission spectroscopy were further used to elucidate the surface electronic properties of the grown Si:β-Ga2O3 films. An upward surface band bending was found at the surface region of Si:β-Ga2O3 films. Interestingly, all the Si:β-Ga2O3 films have a very low work function of approximately 3.3 eV, which makes Si:β-Ga2O3 suitable materials for efficient electron injection. The present Si:β-Ga2O3 films with high conductivity, DUV transparency, and low work function would be useful as the DUV transparent electrode to develop advanced DUV optoelectronic devices." @default.
- W4367173503 created "2023-04-28" @default.
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- W4367173503 date "2023-04-24" @default.
- W4367173503 modified "2023-09-23" @default.
- W4367173503 title "Deep UV transparent conductive Si-doped Ga2O3 thin films grown on Al2O3 substrates" @default.
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- W4367173503 doi "https://doi.org/10.1063/5.0147004" @default.
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