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• W4367302022 endingPage "137" @default.
• W4367302022 startingPage "125" @default.
• W4367302022 abstract "In through-mask electrochemical micromachining (TMEMM), bubbles on the anode surface can lead to ohmic voltage drop and non-uniform conductivity distribution, resulting in lower etching accuracy. With the advantages of low cavitation effect, strong acoustic streaming and high acoustic intensity, megasonic facilitates the reduction of bubble accumulation on the anode surface, thus improving etching accuracy. In this paper, a multiphysics field simulation model is developed to predict the two-phase flow evolution and etching profile at the anode interface. The simulation results show that the gas content at the anode interface in the megasonic field is low, and the gas distribution is relatively uniform. The etching depth and etching uniformity of TMEMM are improved. Experiments demonstrate the accuracy of the proposed simulation model. In addition, micro pits array with CVdiameter and CVdepth of 2.28 % and 5.70 %, respectively, were prepared using the MA-TMEMM method. Visualization experiments systematically study the machining mechanism of MA-TMEMM. The underlying dynamic force balance on the gas bubble is analyzed to illustrate the mechanism and experimental observations. Finally, the advantage of megasonic in removing bubbles from the anode surface to improve etching uniformity was demonstrated by counting the detached bubble diameter and effective coverage." @default.
• W4367302022 created "2023-04-29" @default.
• W4367302022 creator A5031959044 @default.
• W4367302022 creator A5053695454 @default.
• W4367302022 creator A5071432146 @default.
• W4367302022 creator A5071532418 @default.
• W4367302022 creator A5074509186 @default.
• W4367302022 creator A5077788555 @default.
• W4367302022 creator A5087856269 @default.
• W4367302022 date "2023-06-01" @default.
• W4367302022 modified "2023-09-26" @default.
• W4367302022 title "Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics" @default.
• W4367302022 cites W1026012278 @default.
• W4367302022 cites W1965536791 @default.
• W4367302022 cites W1973031237 @default.
• W4367302022 cites W1975557245 @default.
• W4367302022 cites W1984573178 @default.
• W4367302022 cites W1997412410 @default.
• W4367302022 cites W2011416616 @default.
• W4367302022 cites W2011454047 @default.
• W4367302022 cites W2036107315 @default.
• W4367302022 cites W2045448197 @default.
• W4367302022 cites W2054880787 @default.
• W4367302022 cites W2066619071 @default.
• W4367302022 cites W2068934345 @default.
• W4367302022 cites W2077164103 @default.
• W4367302022 cites W2295833753 @default.
• W4367302022 cites W2424034471 @default.
• W4367302022 cites W2571665106 @default.
• W4367302022 cites W2780071667 @default.
• W4367302022 cites W2793624556 @default.
• W4367302022 cites W2796983772 @default.
• W4367302022 cites W2897876586 @default.
• W4367302022 cites W2902161061 @default.
• W4367302022 cites W2965230788 @default.
• W4367302022 cites W2971191915 @default.
• W4367302022 cites W2973385509 @default.
• W4367302022 cites W3037653282 @default.
• W4367302022 cites W3047655517 @default.
• W4367302022 cites W3105533482 @default.
• W4367302022 cites W3199194602 @default.
• W4367302022 cites W3202992489 @default.
• W4367302022 cites W3206741842 @default.
• W4367302022 doi "https://doi.org/10.1016/j.jmapro.2023.04.035" @default.
• W4367302022 hasPublicationYear "2023" @default.
• W4367302022 type Work @default.
• W4367302022 citedByCount "0" @default.
• W4367302022 crossrefType "journal-article" @default.
• W4367302022 hasAuthorship W4367302022A5031959044 @default.
• W4367302022 hasAuthorship W4367302022A5053695454 @default.
• W4367302022 hasAuthorship W4367302022A5071432146 @default.
• W4367302022 hasAuthorship W4367302022A5071532418 @default.
• W4367302022 hasAuthorship W4367302022A5074509186 @default.
• W4367302022 hasAuthorship W4367302022A5077788555 @default.
• W4367302022 hasAuthorship W4367302022A5087856269 @default.
• W4367302022 hasConcept C100460472 @default.
• W4367302022 hasConcept C121332964 @default.
• W4367302022 hasConcept C135628077 @default.
• W4367302022 hasConcept C136525101 @default.
• W4367302022 hasConcept C138230450 @default.
• W4367302022 hasConcept C142724271 @default.
• W4367302022 hasConcept C145667562 @default.
• W4367302022 hasConcept C147789679 @default.
• W4367302022 hasConcept C157915830 @default.
• W4367302022 hasConcept C171250308 @default.
• W4367302022 hasConcept C17525397 @default.
• W4367302022 hasConcept C185592680 @default.
• W4367302022 hasConcept C192562407 @default.
• W4367302022 hasConcept C204787440 @default.
• W4367302022 hasConcept C207057113 @default.
• W4367302022 hasConcept C24890656 @default.
• W4367302022 hasConcept C2779227376 @default.
• W4367302022 hasConcept C33220542 @default.
• W4367302022 hasConcept C46435376 @default.
• W4367302022 hasConcept C49040817 @default.
• W4367302022 hasConcept C57879066 @default.
• W4367302022 hasConcept C71924100 @default.
• W4367302022 hasConcept C89395315 @default.
• W4367302022 hasConcept C97355855 @default.
• W4367302022 hasConceptScore W4367302022C100460472 @default.
• W4367302022 hasConceptScore W4367302022C121332964 @default.
• W4367302022 hasConceptScore W4367302022C135628077 @default.
• W4367302022 hasConceptScore W4367302022C136525101 @default.
• W4367302022 hasConceptScore W4367302022C138230450 @default.
• W4367302022 hasConceptScore W4367302022C142724271 @default.
• W4367302022 hasConceptScore W4367302022C145667562 @default.
• W4367302022 hasConceptScore W4367302022C147789679 @default.
• W4367302022 hasConceptScore W4367302022C157915830 @default.
• W4367302022 hasConceptScore W4367302022C171250308 @default.
• W4367302022 hasConceptScore W4367302022C17525397 @default.
• W4367302022 hasConceptScore W4367302022C185592680 @default.
• W4367302022 hasConceptScore W4367302022C192562407 @default.
• W4367302022 hasConceptScore W4367302022C204787440 @default.
• W4367302022 hasConceptScore W4367302022C207057113 @default.
• W4367302022 hasConceptScore W4367302022C24890656 @default.
• W4367302022 hasConceptScore W4367302022C2779227376 @default.
• W4367302022 hasConceptScore W4367302022C33220542 @default.
• W4367302022 hasConceptScore W4367302022C46435376 @default.

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