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• W4367307989 abstract "This paper presents a feasibility study on patterning the critical layers of Bit-Line Periphery (BLP) and Storage Node Landing Pad (SNLP) for advanced 10nm node DRAM with sub-40nm pitch using a single EUV patterning. Source Mask Optimization (SMO) and aerial image-based Optical Proximity Correction (OPC) were initially conducted to classify image data and identify potential weak points of the primary patterning mask. A secondary patterning mask was then produced based on the resist model and design split using the obtained data on the primary mask to address these issues. Results obtained through PV-band and intensity analysis of each area in simulation, as well as ADI and AEI (After Etch Inspection) using photoresists with 2 kinds of different tones (PTD CAR and Spin-on MOR PR), demonstrated the feasibility of patterning BLP and SNLP with a single EUV mask. Additionally, Process Window Discovery (PWD) wafers were fabricated to analyze and review process margins and potential weak points through KLA inspection for systematic patterning defectivity. Furthermore, our experiments confirmed that the performance of EUV patterning with DRAM BLP/SNLP layer can be expected to improve by reducing the dose (in mJ/cm²) by approximately 30% using a secondary mask by retarget bias split and resist model OPC." @default.
• W4367307989 created "2023-04-29" @default.
• W4367307989 creator A5006911124 @default.
• W4367307989 creator A5018431295 @default.
• W4367307989 creator A5018763027 @default.
• W4367307989 creator A5023625854 @default.
• W4367307989 creator A5027487134 @default.
• W4367307989 creator A5030905932 @default.
• W4367307989 creator A5032649275 @default.
• W4367307989 creator A5037507448 @default.
• W4367307989 creator A5045455320 @default.
• W4367307989 creator A5046751735 @default.
• W4367307989 creator A5057712246 @default.
• W4367307989 creator A5058500847 @default.
• W4367307989 creator A5058814552 @default.
• W4367307989 creator A5064909614 @default.
• W4367307989 creator A5064939573 @default.
• W4367307989 creator A5064981209 @default.
• W4367307989 creator A5067830254 @default.
• W4367307989 creator A5073816370 @default.
• W4367307989 creator A5076956256 @default.
• W4367307989 creator A5081103293 @default.
• W4367307989 date "2023-04-28" @default.
• W4367307989 modified "2023-10-16" @default.
• W4367307989 title "Patterning assessment using 0.33NA EUV single mask for next generation DRAM manufacturing" @default.
• W4367307989 doi "https://doi.org/10.1117/12.2660763" @default.
• W4367307989 hasPublicationYear "2023" @default.
• W4367307989 type Work @default.
• W4367307989 citedByCount "0" @default.
• W4367307989 crossrefType "proceedings-article" @default.
• W4367307989 hasAuthorship W4367307989A5006911124 @default.
• W4367307989 hasAuthorship W4367307989A5018431295 @default.
• W4367307989 hasAuthorship W4367307989A5018763027 @default.
• W4367307989 hasAuthorship W4367307989A5023625854 @default.
• W4367307989 hasAuthorship W4367307989A5027487134 @default.
• W4367307989 hasAuthorship W4367307989A5030905932 @default.
• W4367307989 hasAuthorship W4367307989A5032649275 @default.
• W4367307989 hasAuthorship W4367307989A5037507448 @default.
• W4367307989 hasAuthorship W4367307989A5045455320 @default.
• W4367307989 hasAuthorship W4367307989A5046751735 @default.
• W4367307989 hasAuthorship W4367307989A5057712246 @default.
• W4367307989 hasAuthorship W4367307989A5058500847 @default.
• W4367307989 hasAuthorship W4367307989A5058814552 @default.
• W4367307989 hasAuthorship W4367307989A5064909614 @default.
• W4367307989 hasAuthorship W4367307989A5064939573 @default.
• W4367307989 hasAuthorship W4367307989A5064981209 @default.
• W4367307989 hasAuthorship W4367307989A5067830254 @default.
• W4367307989 hasAuthorship W4367307989A5073816370 @default.
• W4367307989 hasAuthorship W4367307989A5076956256 @default.
• W4367307989 hasAuthorship W4367307989A5081103293 @default.
• W4367307989 hasConcept C105487726 @default.
• W4367307989 hasConcept C115961682 @default.
• W4367307989 hasConcept C118702147 @default.
• W4367307989 hasConcept C120665830 @default.
• W4367307989 hasConcept C121332964 @default.
• W4367307989 hasConcept C146024833 @default.
• W4367307989 hasConcept C154945302 @default.
• W4367307989 hasConcept C160671074 @default.
• W4367307989 hasConcept C162996421 @default.
• W4367307989 hasConcept C171250308 @default.
• W4367307989 hasConcept C177409738 @default.
• W4367307989 hasConcept C192562407 @default.
• W4367307989 hasConcept C200274948 @default.
• W4367307989 hasConcept C204223013 @default.
• W4367307989 hasConcept C207789793 @default.
• W4367307989 hasConcept C24890656 @default.
• W4367307989 hasConcept C2776429412 @default.
• W4367307989 hasConcept C2777441419 @default.
• W4367307989 hasConcept C2777953097 @default.
• W4367307989 hasConcept C2779227376 @default.
• W4367307989 hasConcept C41008148 @default.
• W4367307989 hasConcept C49040817 @default.
• W4367307989 hasConcept C520434653 @default.
• W4367307989 hasConcept C53524968 @default.
• W4367307989 hasConcept C62611344 @default.
• W4367307989 hasConcept C68043766 @default.
• W4367307989 hasConcept C7366592 @default.
• W4367307989 hasConcept C78371743 @default.
• W4367307989 hasConcept C9390403 @default.
• W4367307989 hasConcept C98986596 @default.
• W4367307989 hasConceptScore W4367307989C105487726 @default.
• W4367307989 hasConceptScore W4367307989C115961682 @default.
• W4367307989 hasConceptScore W4367307989C118702147 @default.
• W4367307989 hasConceptScore W4367307989C120665830 @default.
• W4367307989 hasConceptScore W4367307989C121332964 @default.
• W4367307989 hasConceptScore W4367307989C146024833 @default.
• W4367307989 hasConceptScore W4367307989C154945302 @default.
• W4367307989 hasConceptScore W4367307989C160671074 @default.
• W4367307989 hasConceptScore W4367307989C162996421 @default.
• W4367307989 hasConceptScore W4367307989C171250308 @default.
• W4367307989 hasConceptScore W4367307989C177409738 @default.
• W4367307989 hasConceptScore W4367307989C192562407 @default.
• W4367307989 hasConceptScore W4367307989C200274948 @default.
• W4367307989 hasConceptScore W4367307989C204223013 @default.
• W4367307989 hasConceptScore W4367307989C207789793 @default.
• W4367307989 hasConceptScore W4367307989C24890656 @default.
• W4367307989 hasConceptScore W4367307989C2776429412 @default.
• W4367307989 hasConceptScore W4367307989C2777441419 @default.
• W4367307989 hasConceptScore W4367307989C2777953097 @default.
• W4367307989 hasConceptScore W4367307989C2779227376 @default.

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