Matches in SemOpenAlex for { <https://semopenalex.org/work/W4367308003> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W4367308003 abstract "By adopting the new design of the optics within the scanner, high-NA (0.55NA) EUV lithography enables higher resolution, which will push the EUV single patterning down to pitch 16nm (k1=0.34, the same k1 value as pitch 28nm for 0.33NA EUV single patterning). Therefore, 0.55NA EUVL is projected to print the most critical features of 2nm node (and beyond) logic chips with less patterning steps than 0.33NA EUVL, and is highly expected by the industry. Besides, novel low-n low-k absorber attenuated phase shift masks (low-n attPSMs) are commercially available recently, which have shown substantial imaging, as well as patterning performance improvements both in simulations and experiments. Thus, in this paper, we evaluate the feasibility and limits of logic metal scaling with 0.55NA EUV single pattering using source mask optimization tool, both binary and low-n attPSMs are used to pattern an imec N3 (pitch 28nm, foundry N2 equivalent) random logic metal design and the linear scaled versions (down to pitch 18nm). The impact of design orientations (horizontal vs. vertical) and mask tones (dark field vs. bright field) on patterning fidelity and overall process window is evaluated." @default.
- W4367308003 created "2023-04-29" @default.
- W4367308003 creator A5007990337 @default.
- W4367308003 creator A5015570284 @default.
- W4367308003 creator A5046348806 @default.
- W4367308003 creator A5050481807 @default.
- W4367308003 creator A5057712246 @default.
- W4367308003 date "2023-04-28" @default.
- W4367308003 modified "2023-09-30" @default.
- W4367308003 title "Feasibility of logic metal scaling with 0.55NA EUV single patterning" @default.
- W4367308003 doi "https://doi.org/10.1117/12.2657983" @default.
- W4367308003 hasPublicationYear "2023" @default.
- W4367308003 type Work @default.
- W4367308003 citedByCount "0" @default.
- W4367308003 crossrefType "proceedings-article" @default.
- W4367308003 hasAuthorship W4367308003A5007990337 @default.
- W4367308003 hasAuthorship W4367308003A5015570284 @default.
- W4367308003 hasAuthorship W4367308003A5046348806 @default.
- W4367308003 hasAuthorship W4367308003A5050481807 @default.
- W4367308003 hasAuthorship W4367308003A5057712246 @default.
- W4367308003 hasConcept C105487726 @default.
- W4367308003 hasConcept C120665830 @default.
- W4367308003 hasConcept C121332964 @default.
- W4367308003 hasConcept C127413603 @default.
- W4367308003 hasConcept C133386390 @default.
- W4367308003 hasConcept C146024833 @default.
- W4367308003 hasConcept C162996421 @default.
- W4367308003 hasConcept C163581340 @default.
- W4367308003 hasConcept C171250308 @default.
- W4367308003 hasConcept C177409738 @default.
- W4367308003 hasConcept C182873914 @default.
- W4367308003 hasConcept C192562407 @default.
- W4367308003 hasConcept C200274948 @default.
- W4367308003 hasConcept C204223013 @default.
- W4367308003 hasConcept C24326235 @default.
- W4367308003 hasConcept C2776628375 @default.
- W4367308003 hasConcept C2777441419 @default.
- W4367308003 hasConcept C2779227376 @default.
- W4367308003 hasConcept C2779751349 @default.
- W4367308003 hasConcept C41008148 @default.
- W4367308003 hasConcept C49040817 @default.
- W4367308003 hasConcept C520434653 @default.
- W4367308003 hasConcept C53524968 @default.
- W4367308003 hasConceptScore W4367308003C105487726 @default.
- W4367308003 hasConceptScore W4367308003C120665830 @default.
- W4367308003 hasConceptScore W4367308003C121332964 @default.
- W4367308003 hasConceptScore W4367308003C127413603 @default.
- W4367308003 hasConceptScore W4367308003C133386390 @default.
- W4367308003 hasConceptScore W4367308003C146024833 @default.
- W4367308003 hasConceptScore W4367308003C162996421 @default.
- W4367308003 hasConceptScore W4367308003C163581340 @default.
- W4367308003 hasConceptScore W4367308003C171250308 @default.
- W4367308003 hasConceptScore W4367308003C177409738 @default.
- W4367308003 hasConceptScore W4367308003C182873914 @default.
- W4367308003 hasConceptScore W4367308003C192562407 @default.
- W4367308003 hasConceptScore W4367308003C200274948 @default.
- W4367308003 hasConceptScore W4367308003C204223013 @default.
- W4367308003 hasConceptScore W4367308003C24326235 @default.
- W4367308003 hasConceptScore W4367308003C2776628375 @default.
- W4367308003 hasConceptScore W4367308003C2777441419 @default.
- W4367308003 hasConceptScore W4367308003C2779227376 @default.
- W4367308003 hasConceptScore W4367308003C2779751349 @default.
- W4367308003 hasConceptScore W4367308003C41008148 @default.
- W4367308003 hasConceptScore W4367308003C49040817 @default.
- W4367308003 hasConceptScore W4367308003C520434653 @default.
- W4367308003 hasConceptScore W4367308003C53524968 @default.
- W4367308003 hasLocation W43673080031 @default.
- W4367308003 hasOpenAccess W4367308003 @default.
- W4367308003 hasPrimaryLocation W43673080031 @default.
- W4367308003 hasRelatedWork W1991213903 @default.
- W4367308003 hasRelatedWork W1995694374 @default.
- W4367308003 hasRelatedWork W2000786064 @default.
- W4367308003 hasRelatedWork W2037365610 @default.
- W4367308003 hasRelatedWork W2080447637 @default.
- W4367308003 hasRelatedWork W2104684732 @default.
- W4367308003 hasRelatedWork W2174426231 @default.
- W4367308003 hasRelatedWork W2791370716 @default.
- W4367308003 hasRelatedWork W2921086790 @default.
- W4367308003 hasRelatedWork W4229021908 @default.
- W4367308003 isParatext "false" @default.
- W4367308003 isRetracted "false" @default.
- W4367308003 workType "article" @default.