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- W4367603213 abstract "Fundamental understanding of the physical processes controlling deprotection in chemical amplified resists (CARs) is critical to improve their utility for high-resolution lithography. We employ a combined experimental and computational method to examine the impacts of excess free volume generation, reaction byproducts, catalyst clustering, and catalyst counter-anion chemistry/size on deprotection rates in a model terpolymer CAR. These studies suggest that catalyst diffusion can be enhanced by a combination of excess free volume and reaction byproducts, and that counter-anion chemistry/size plays a key role in local reaction rates, which stems from differences in the rotational mobility of the catalyst." @default.
- W4367603213 created "2023-05-02" @default.
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- W4367603213 date "2023-05-01" @default.
- W4367603213 modified "2023-10-01" @default.
- W4367603213 title "Role of counter-anion chemistry, free volume, and reaction byproducts in chemically amplified resists" @default.
- W4367603213 doi "https://doi.org/10.1117/12.2656952" @default.
- W4367603213 hasPublicationYear "2023" @default.
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