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- W4367603241 abstract "TMAH, tetra-methyl ammonium hydroxide, aqueous solution is widely used as a photoresist developer. The resist development process is the final process of the resist patterning process, just before an etching process, therefore we have to pay attention to the cleanliness of the TMAH developer, especially metal contamination. The reason metal contamination is most concerning is that metal impurities typically can’t be detected by general pattern defect inspection tools. Additionally, metal impurities inside the resist and underlayer films can become etch stoppers because of the lower etching rate of the metal. This makes reducing metal impurities from TMAH aqueous solution critical. One of the convenient and promising devices to reduce metal impurities from chemicals are metal purifiers in form of the filter devices. Strong cation type ion-exchange media is widely used for metal reduction in various industries. When we applied this type of metal purifier to a TMAH solution, metal removal efficiency was low. We decided to develop new purifier media to reduce metal impurities in TMAH solutions. Using surface modified polyethylene (PE) media as the basic purifier media, we found that chelating modified PE showed the better metal removal performance. We also noticed a difference between non-woven PE and PE membrane on the metal removal performance. Finally, we were able to improve the metal removal efficiency by optimization of the functional group and membrane structure." @default.
- W4367603241 created "2023-05-02" @default.
- W4367603241 creator A5044415438 @default.
- W4367603241 creator A5049807329 @default.
- W4367603241 creator A5055850729 @default.
- W4367603241 date "2023-05-01" @default.
- W4367603241 modified "2023-09-30" @default.
- W4367603241 title "Metal purifier for TMAH developer solution" @default.
- W4367603241 doi "https://doi.org/10.1117/12.2654118" @default.
- W4367603241 hasPublicationYear "2023" @default.
- W4367603241 type Work @default.
- W4367603241 citedByCount "0" @default.
- W4367603241 crossrefType "proceedings-article" @default.
- W4367603241 hasAuthorship W4367603241A5044415438 @default.
- W4367603241 hasAuthorship W4367603241A5049807329 @default.
- W4367603241 hasAuthorship W4367603241A5055850729 @default.
- W4367603241 hasConcept C100460472 @default.
- W4367603241 hasConcept C127413603 @default.
- W4367603241 hasConcept C134406635 @default.
- W4367603241 hasConcept C165460524 @default.
- W4367603241 hasConcept C171250308 @default.
- W4367603241 hasConcept C178790620 @default.
- W4367603241 hasConcept C179104552 @default.
- W4367603241 hasConcept C184651966 @default.
- W4367603241 hasConcept C185592680 @default.
- W4367603241 hasConcept C191897082 @default.
- W4367603241 hasConcept C192562407 @default.
- W4367603241 hasConcept C197404232 @default.
- W4367603241 hasConcept C2777129401 @default.
- W4367603241 hasConcept C2777879272 @default.
- W4367603241 hasConcept C2779227376 @default.
- W4367603241 hasConcept C42360764 @default.
- W4367603241 hasConcept C53524968 @default.
- W4367603241 hasConcept C544153396 @default.
- W4367603241 hasConcept C71987851 @default.
- W4367603241 hasConceptScore W4367603241C100460472 @default.
- W4367603241 hasConceptScore W4367603241C127413603 @default.
- W4367603241 hasConceptScore W4367603241C134406635 @default.
- W4367603241 hasConceptScore W4367603241C165460524 @default.
- W4367603241 hasConceptScore W4367603241C171250308 @default.
- W4367603241 hasConceptScore W4367603241C178790620 @default.
- W4367603241 hasConceptScore W4367603241C179104552 @default.
- W4367603241 hasConceptScore W4367603241C184651966 @default.
- W4367603241 hasConceptScore W4367603241C185592680 @default.
- W4367603241 hasConceptScore W4367603241C191897082 @default.
- W4367603241 hasConceptScore W4367603241C192562407 @default.
- W4367603241 hasConceptScore W4367603241C197404232 @default.
- W4367603241 hasConceptScore W4367603241C2777129401 @default.
- W4367603241 hasConceptScore W4367603241C2777879272 @default.
- W4367603241 hasConceptScore W4367603241C2779227376 @default.
- W4367603241 hasConceptScore W4367603241C42360764 @default.
- W4367603241 hasConceptScore W4367603241C53524968 @default.
- W4367603241 hasConceptScore W4367603241C544153396 @default.
- W4367603241 hasConceptScore W4367603241C71987851 @default.
- W4367603241 hasLocation W43676032411 @default.
- W4367603241 hasOpenAccess W4367603241 @default.
- W4367603241 hasPrimaryLocation W43676032411 @default.
- W4367603241 hasRelatedWork W1995676007 @default.
- W4367603241 hasRelatedWork W2015083230 @default.
- W4367603241 hasRelatedWork W2028999317 @default.
- W4367603241 hasRelatedWork W2052356061 @default.
- W4367603241 hasRelatedWork W2089746739 @default.
- W4367603241 hasRelatedWork W2099612599 @default.
- W4367603241 hasRelatedWork W2113489028 @default.
- W4367603241 hasRelatedWork W2128421177 @default.
- W4367603241 hasRelatedWork W2146612619 @default.
- W4367603241 hasRelatedWork W2742685503 @default.
- W4367603241 isParatext "false" @default.
- W4367603241 isRetracted "false" @default.
- W4367603241 workType "article" @default.