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• W4367843451 abstract "We demonstrate a microkinetic modeling framework which is a first principle-based surface reaction thermodynamics modeling methodology to describe the plasma-enhanced atomic layer deposition process of silicon nitride thin film formation. The results illustrating the relationship between silicon nitride growth per cycle (GPC) and quasi self-limiting behavior on both dichlorosilane precursor dose amount and plasma nitridation time are consistent with the experiment. Ultimately, GPC is limited to the equivalent of a half monolayer of a Si3N4 crystalline structure. Importantly, we have observed a strong correlation between subsurface NH terminated Si group concentration and HF wet etch rate by an experiment, which varies with substrate temperature." @default.
• W4367843451 created "2023-05-04" @default.
• W4367843451 creator A5004400986 @default.
• W4367843451 creator A5056369875 @default.
• W4367843451 creator A5063853097 @default.
• W4367843451 creator A5087273177 @default.
• W4367843451 date "2023-05-01" @default.
• W4367843451 modified "2023-09-29" @default.
• W4367843451 title "Microkinetic based growth and property modeling of plasma enhanced atomic layer deposition silicon nitride thin film" @default.
• W4367843451 cites W1547482991 @default.
• W4367843451 cites W1560368179 @default.
• W4367843451 cites W1665120302 @default.
• W4367843451 cites W1991557179 @default.
• W4367843451 cites W1993298045 @default.
• W4367843451 cites W2001848482 @default.
• W4367843451 cites W2017189043 @default.
• W4367843451 cites W2020111073 @default.
• W4367843451 cites W2024459419 @default.
• W4367843451 cites W2043421365 @default.
• W4367843451 cites W2053337260 @default.
• W4367843451 cites W2067186721 @default.
• W4367843451 cites W2079659778 @default.
• W4367843451 cites W2087784862 @default.
• W4367843451 cites W2089356390 @default.
• W4367843451 cites W2091176599 @default.
• W4367843451 cites W2094553608 @default.
• W4367843451 cites W2137699376 @default.
• W4367843451 cites W2149248689 @default.
• W4367843451 cites W2173875385 @default.
• W4367843451 cites W2409564094 @default.
• W4367843451 cites W2556404947 @default.
• W4367843451 cites W2563810937 @default.
• W4367843451 cites W2566647538 @default.
• W4367843451 cites W2621797026 @default.
• W4367843451 cites W2772211699 @default.
• W4367843451 cites W2899351220 @default.
• W4367843451 cites W3100541053 @default.
• W4367843451 cites W3131011753 @default.
• W4367843451 doi "https://doi.org/10.1116/6.0002499" @default.
• W4367843451 hasPublicationYear "2023" @default.
• W4367843451 type Work @default.
• W4367843451 citedByCount "0" @default.
• W4367843451 crossrefType "journal-article" @default.
• W4367843451 hasAuthorship W4367843451A5004400986 @default.
• W4367843451 hasAuthorship W4367843451A5056369875 @default.
• W4367843451 hasAuthorship W4367843451A5063853097 @default.
• W4367843451 hasAuthorship W4367843451A5087273177 @default.
• W4367843451 hasBestOaLocation W43678434511 @default.
• W4367843451 hasConcept C111368507 @default.
• W4367843451 hasConcept C113196181 @default.
• W4367843451 hasConcept C121332964 @default.
• W4367843451 hasConcept C127313418 @default.
• W4367843451 hasConcept C127413603 @default.
• W4367843451 hasConcept C151730666 @default.
• W4367843451 hasConcept C171250308 @default.
• W4367843451 hasConcept C178790620 @default.
• W4367843451 hasConcept C185592680 @default.
• W4367843451 hasConcept C19067145 @default.
• W4367843451 hasConcept C192562407 @default.
• W4367843451 hasConcept C194760766 @default.
• W4367843451 hasConcept C2777289219 @default.
• W4367843451 hasConcept C2777431650 @default.
• W4367843451 hasConcept C2779227376 @default.
• W4367843451 hasConcept C2779523567 @default.
• W4367843451 hasConcept C2816523 @default.
• W4367843451 hasConcept C42360764 @default.
• W4367843451 hasConcept C49040817 @default.
• W4367843451 hasConcept C544956773 @default.
• W4367843451 hasConcept C62520636 @default.
• W4367843451 hasConcept C64297162 @default.
• W4367843451 hasConcept C69544855 @default.
• W4367843451 hasConcept C7070889 @default.
• W4367843451 hasConcept C82706917 @default.
• W4367843451 hasConcept C86803240 @default.
• W4367843451 hasConceptScore W4367843451C111368507 @default.
• W4367843451 hasConceptScore W4367843451C113196181 @default.
• W4367843451 hasConceptScore W4367843451C121332964 @default.
• W4367843451 hasConceptScore W4367843451C127313418 @default.
• W4367843451 hasConceptScore W4367843451C127413603 @default.
• W4367843451 hasConceptScore W4367843451C151730666 @default.
• W4367843451 hasConceptScore W4367843451C171250308 @default.
• W4367843451 hasConceptScore W4367843451C178790620 @default.
• W4367843451 hasConceptScore W4367843451C185592680 @default.
• W4367843451 hasConceptScore W4367843451C19067145 @default.
• W4367843451 hasConceptScore W4367843451C192562407 @default.
• W4367843451 hasConceptScore W4367843451C194760766 @default.
• W4367843451 hasConceptScore W4367843451C2777289219 @default.
• W4367843451 hasConceptScore W4367843451C2777431650 @default.
• W4367843451 hasConceptScore W4367843451C2779227376 @default.
• W4367843451 hasConceptScore W4367843451C2779523567 @default.
• W4367843451 hasConceptScore W4367843451C2816523 @default.
• W4367843451 hasConceptScore W4367843451C42360764 @default.
• W4367843451 hasConceptScore W4367843451C49040817 @default.
• W4367843451 hasConceptScore W4367843451C544956773 @default.
• W4367843451 hasConceptScore W4367843451C62520636 @default.
• W4367843451 hasConceptScore W4367843451C64297162 @default.
• W4367843451 hasConceptScore W4367843451C69544855 @default.
• W4367843451 hasConceptScore W4367843451C7070889 @default.
• W4367843451 hasConceptScore W4367843451C82706917 @default.
• W4367843451 hasConceptScore W4367843451C86803240 @default.

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