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• W4372291573 endingPage "1780" @default.
• W4372291573 startingPage "1780" @default.
• W4372291573 abstract "We present a systematic investigation of an SiO 2 etching process using a standard fluorocarbon chemistry ICP-RIE etch tool with a cryogenically cooled electrode. Our goal is to enable the control of the SiO 2 feature morphology, i.e., the sidewall angle, in order to add a degree of freedom for the design of resonant micro-/nanooptical elements. For such elements as e.g., whispering gallery mode resonators with specific mode profiles, it is essential to maintain low surface roughness. To this end, we investigate a variety of gas compositions. For statistical evaluation, we use a surface response methodology for several parameters and investigate the influence of the substrate temperature on the sidewall angle. Different hypotheses from the literature for the cause of non-anisotropic etch behavior are discussed for our specific case. Various investigations based on the prior hypothesis are presented, which provide more information about the pseudo-isotropic etch profile. Finally, we present two use cases: firstly, a classical anisotropic etch with a high aspect ratio and very low roughness (<1 nm), and secondly, an etch process for the fabrication of whispering gallery mode resonators that confine the light at the bottom of the resonator." @default.
• W4372291573 created "2023-05-07" @default.
• W4372291573 creator A5039808453 @default.
• W4372291573 creator A5083649362 @default.
• W4372291573 date "2023-05-31" @default.
• W4372291573 modified "2023-10-18" @default.
• W4372291573 title "2.5D+ plasma etching for a continuously adjustable sidewall angle in SiO₂" @default.
• W4372291573 cites W1869295919 @default.
• W4372291573 cites W1994584923 @default.
• W4372291573 cites W2012854819 @default.
• W4372291573 cites W2012876626 @default.
• W4372291573 cites W2016399002 @default.
• W4372291573 cites W2017595383 @default.
• W4372291573 cites W2025234898 @default.
• W4372291573 cites W2028277395 @default.
• W4372291573 cites W2032907123 @default.
• W4372291573 cites W2037894164 @default.
• W4372291573 cites W2039574057 @default.
• W4372291573 cites W2044820852 @default.
• W4372291573 cites W2046836154 @default.
• W4372291573 cites W2052973535 @default.
• W4372291573 cites W2053356762 @default.
• W4372291573 cites W2062799632 @default.
• W4372291573 cites W2065372341 @default.
• W4372291573 cites W2089347488 @default.
• W4372291573 cites W2115505676 @default.
• W4372291573 cites W2229833976 @default.
• W4372291573 cites W2529978884 @default.
• W4372291573 cites W2782395506 @default.
• W4372291573 cites W2979773894 @default.
• W4372291573 cites W3001947381 @default.
• W4372291573 cites W3047227872 @default.
• W4372291573 cites W3119312308 @default.
• W4372291573 cites W3133161027 @default.
• W4372291573 cites W3202291134 @default.
• W4372291573 cites W3214257557 @default.
• W4372291573 cites W4214517867 @default.
• W4372291573 doi "https://doi.org/10.1364/ome.484157" @default.
• W4372291573 hasPublicationYear "2023" @default.
• W4372291573 type Work @default.
• W4372291573 citedByCount "0" @default.
• W4372291573 crossrefType "journal-article" @default.
• W4372291573 hasAuthorship W4372291573A5039808453 @default.
• W4372291573 hasAuthorship W4372291573A5083649362 @default.
• W4372291573 hasBestOaLocation W43722915731 @default.
• W4372291573 hasConcept C100460472 @default.
• W4372291573 hasConcept C107187091 @default.
• W4372291573 hasConcept C107365816 @default.
• W4372291573 hasConcept C111368507 @default.
• W4372291573 hasConcept C120665830 @default.
• W4372291573 hasConcept C121332964 @default.
• W4372291573 hasConcept C127313418 @default.
• W4372291573 hasConcept C136525101 @default.
• W4372291573 hasConcept C142724271 @default.
• W4372291573 hasConcept C145667562 @default.
• W4372291573 hasConcept C159985019 @default.
• W4372291573 hasConcept C171250308 @default.
• W4372291573 hasConcept C184050105 @default.
• W4372291573 hasConcept C192562407 @default.
• W4372291573 hasConcept C204787440 @default.
• W4372291573 hasConcept C2777289219 @default.
• W4372291573 hasConcept C2779227376 @default.
• W4372291573 hasConcept C49040817 @default.
• W4372291573 hasConcept C71039073 @default.
• W4372291573 hasConcept C71924100 @default.
• W4372291573 hasConcept C77255779 @default.
• W4372291573 hasConcept C97126364 @default.
• W4372291573 hasConceptScore W4372291573C100460472 @default.
• W4372291573 hasConceptScore W4372291573C107187091 @default.
• W4372291573 hasConceptScore W4372291573C107365816 @default.
• W4372291573 hasConceptScore W4372291573C111368507 @default.
• W4372291573 hasConceptScore W4372291573C120665830 @default.
• W4372291573 hasConceptScore W4372291573C121332964 @default.
• W4372291573 hasConceptScore W4372291573C127313418 @default.
• W4372291573 hasConceptScore W4372291573C136525101 @default.
• W4372291573 hasConceptScore W4372291573C142724271 @default.
• W4372291573 hasConceptScore W4372291573C145667562 @default.
• W4372291573 hasConceptScore W4372291573C159985019 @default.
• W4372291573 hasConceptScore W4372291573C171250308 @default.
• W4372291573 hasConceptScore W4372291573C184050105 @default.
• W4372291573 hasConceptScore W4372291573C192562407 @default.
• W4372291573 hasConceptScore W4372291573C204787440 @default.
• W4372291573 hasConceptScore W4372291573C2777289219 @default.
• W4372291573 hasConceptScore W4372291573C2779227376 @default.
• W4372291573 hasConceptScore W4372291573C49040817 @default.
• W4372291573 hasConceptScore W4372291573C71039073 @default.
• W4372291573 hasConceptScore W4372291573C71924100 @default.
• W4372291573 hasConceptScore W4372291573C77255779 @default.
• W4372291573 hasConceptScore W4372291573C97126364 @default.
• W4372291573 hasFunder F4320320879 @default.
• W4372291573 hasIssue "6" @default.
• W4372291573 hasLocation W43722915731 @default.
• W4372291573 hasOpenAccess W4372291573 @default.
• W4372291573 hasPrimaryLocation W43722915731 @default.
• W4372291573 hasRelatedWork W1851831909 @default.
• W4372291573 hasRelatedWork W1953159322 @default.
• W4372291573 hasRelatedWork W2007813469 @default.
• W4372291573 hasRelatedWork W2022407713 @default.

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