Matches in SemOpenAlex for { <https://semopenalex.org/work/W4375851291> ?p ?o ?g. }
- W4375851291 endingPage "119903" @default.
- W4375851291 startingPage "119903" @default.
- W4375851291 abstract "The pixelation of Micro-LED still faces intractable technological problems with the shrinkage of pixel by using conventional mesa etching processes, such as reduced luminous efficiency and tough metal interconnection. In this work, a novel pixelation strategy using fluorine (F) ion implantation with tailored injection energy and dose has been proposed and investigated through simulation and experiment. It is found that both the injection depth and spatial distribution range are determined by injection energy. The lateral spreading of the F ions could be effectively suppressed by decreasing injection energy and increasing dose while achieving equal electrical isolation. Furthermore, the uniformity of lateral spreading could be improved by introducing multi-energy injections. For verification and demonstration, Micro-LED arrays with fixed pitch and various pixel sizes were fabricated by F ion implantation, both photoluminescence and electroluminescence characteristics show that the pixel contrast and uniformity are well maintained even for the Micro-LED array with pixel size of 10 μm. For Micro-LED array with pitch and pixel sizes of 40 μm and 10 μm, the reverse leakage currents at a reverse bias voltage of −5 V is 1.45 × 10−7 A, which is lower than that formed by conventional bench top etching. The pixelation method by fluorine ion implantation with tailored injection energy and dose is expected to be able to pave the way toward high-performance Micro-LED and Nano-LED displays." @default.
- W4375851291 created "2023-05-10" @default.
- W4375851291 creator A5016338405 @default.
- W4375851291 creator A5020825482 @default.
- W4375851291 creator A5031563429 @default.
- W4375851291 creator A5035976413 @default.
- W4375851291 creator A5038216241 @default.
- W4375851291 creator A5039773952 @default.
- W4375851291 creator A5045673263 @default.
- W4375851291 creator A5052972007 @default.
- W4375851291 creator A5053199856 @default.
- W4375851291 creator A5087854494 @default.
- W4375851291 date "2023-09-01" @default.
- W4375851291 modified "2023-10-18" @default.
- W4375851291 title "Pixelation of GaN based Micro-LED arrays by tailoring injection energy and dose of fluorine ion implantation" @default.
- W4375851291 cites W1964371904 @default.
- W4375851291 cites W1986608688 @default.
- W4375851291 cites W1988531584 @default.
- W4375851291 cites W2007384521 @default.
- W4375851291 cites W2020944319 @default.
- W4375851291 cites W2022720715 @default.
- W4375851291 cites W2027568818 @default.
- W4375851291 cites W2051958619 @default.
- W4375851291 cites W2057053952 @default.
- W4375851291 cites W2072531248 @default.
- W4375851291 cites W2092761244 @default.
- W4375851291 cites W2118783459 @default.
- W4375851291 cites W2119861565 @default.
- W4375851291 cites W2122134584 @default.
- W4375851291 cites W2166153690 @default.
- W4375851291 cites W2585555740 @default.
- W4375851291 cites W2589345301 @default.
- W4375851291 cites W2735323398 @default.
- W4375851291 cites W2887291939 @default.
- W4375851291 cites W2905965379 @default.
- W4375851291 cites W2921385072 @default.
- W4375851291 cites W2942718128 @default.
- W4375851291 cites W2957894857 @default.
- W4375851291 cites W2972520311 @default.
- W4375851291 cites W2986121797 @default.
- W4375851291 cites W3047420387 @default.
- W4375851291 cites W3091852797 @default.
- W4375851291 cites W3120575528 @default.
- W4375851291 cites W3123761459 @default.
- W4375851291 cites W3132871774 @default.
- W4375851291 cites W3137875753 @default.
- W4375851291 cites W4211177244 @default.
- W4375851291 cites W4226108856 @default.
- W4375851291 doi "https://doi.org/10.1016/j.jlumin.2023.119903" @default.
- W4375851291 hasPublicationYear "2023" @default.
- W4375851291 type Work @default.
- W4375851291 citedByCount "0" @default.
- W4375851291 crossrefType "journal-article" @default.
- W4375851291 hasAuthorship W4375851291A5016338405 @default.
- W4375851291 hasAuthorship W4375851291A5020825482 @default.
- W4375851291 hasAuthorship W4375851291A5031563429 @default.
- W4375851291 hasAuthorship W4375851291A5035976413 @default.
- W4375851291 hasAuthorship W4375851291A5038216241 @default.
- W4375851291 hasAuthorship W4375851291A5039773952 @default.
- W4375851291 hasAuthorship W4375851291A5045673263 @default.
- W4375851291 hasAuthorship W4375851291A5052972007 @default.
- W4375851291 hasAuthorship W4375851291A5053199856 @default.
- W4375851291 hasAuthorship W4375851291A5087854494 @default.
- W4375851291 hasConcept C120665830 @default.
- W4375851291 hasConcept C121332964 @default.
- W4375851291 hasConcept C145148216 @default.
- W4375851291 hasConcept C160633673 @default.
- W4375851291 hasConcept C171250308 @default.
- W4375851291 hasConcept C178790620 @default.
- W4375851291 hasConcept C179813606 @default.
- W4375851291 hasConcept C185592680 @default.
- W4375851291 hasConcept C192562407 @default.
- W4375851291 hasConcept C2779227376 @default.
- W4375851291 hasConcept C31625292 @default.
- W4375851291 hasConcept C41823505 @default.
- W4375851291 hasConcept C49040817 @default.
- W4375851291 hasConcept C85080765 @default.
- W4375851291 hasConceptScore W4375851291C120665830 @default.
- W4375851291 hasConceptScore W4375851291C121332964 @default.
- W4375851291 hasConceptScore W4375851291C145148216 @default.
- W4375851291 hasConceptScore W4375851291C160633673 @default.
- W4375851291 hasConceptScore W4375851291C171250308 @default.
- W4375851291 hasConceptScore W4375851291C178790620 @default.
- W4375851291 hasConceptScore W4375851291C179813606 @default.
- W4375851291 hasConceptScore W4375851291C185592680 @default.
- W4375851291 hasConceptScore W4375851291C192562407 @default.
- W4375851291 hasConceptScore W4375851291C2779227376 @default.
- W4375851291 hasConceptScore W4375851291C31625292 @default.
- W4375851291 hasConceptScore W4375851291C41823505 @default.
- W4375851291 hasConceptScore W4375851291C49040817 @default.
- W4375851291 hasConceptScore W4375851291C85080765 @default.
- W4375851291 hasFunder F4320321878 @default.
- W4375851291 hasFunder F4320325408 @default.
- W4375851291 hasFunder F4320335777 @default.
- W4375851291 hasLocation W43758512911 @default.
- W4375851291 hasOpenAccess W4375851291 @default.
- W4375851291 hasPrimaryLocation W43758512911 @default.
- W4375851291 hasRelatedWork W1967170800 @default.