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- W4376271646 abstract "This paper discusses ways to reduce micro masking due to Copper (Cu) precipitation during reactive ion etching (RIE) to form thick top metal bond pads or inductors. Adding Argon (Ar) and Nitrogen (N2) in the over etch step during metal etch can significantly reduce micro-masking caused by Cu precipitation. The introduction of Ar and N2 can have several effects on the RIE process, such as improving the ionizing effect during Al/TiN barrier etch by altering the ion energy to effectively remove the Cu precipitation at the grain boundaries of Al and TiN interfaces" @default.
- W4376271646 created "2023-05-13" @default.
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- W4376271646 date "2023-05-01" @default.
- W4376271646 modified "2023-09-30" @default.
- W4376271646 title "Method to Reduce Micromasking defects caused by Cu precipitation using Ar/N<sub>2</sub> plasma : YE: Yield Enhancement/Learning" @default.
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- W4376271646 doi "https://doi.org/10.1109/asmc57536.2023.10121120" @default.
- W4376271646 hasPublicationYear "2023" @default.
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