FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4376272018> ?p ?o ?g. }

• W4376272018 abstract "Oxide selectivity at Fin reveal dry etching is studied by varying the CxFy gas flow and etch time. Defectivity and yield of the resulting FinFET devices are compared. Also, a new detection method is evaluated for early warnings of defects due to oxide selectivity. Such learning may improve the efficiency of enhanced performance FinFET devices and reduce fabrication cost." @default.
• W4376272018 created "2023-05-13" @default.
• W4376272018 creator A5003127003 @default.
• W4376272018 creator A5004404477 @default.
• W4376272018 creator A5007230969 @default.
• W4376272018 creator A5021367161 @default.
• W4376272018 creator A5028062235 @default.
• W4376272018 creator A5051204921 @default.
• W4376272018 creator A5057663679 @default.
• W4376272018 creator A5068129840 @default.
• W4376272018 creator A5073736649 @default.
• W4376272018 creator A5080700909 @default.
• W4376272018 creator A5083193033 @default.
• W4376272018 date "2023-05-01" @default.
• W4376272018 modified "2023-10-01" @default.
• W4376272018 title "Fin Reveal RIE Process Investigation" @default.
• W4376272018 cites W1966192242 @default.
• W4376272018 cites W1967709316 @default.
• W4376272018 cites W2039574057 @default.
• W4376272018 cites W2046354366 @default.
• W4376272018 cites W2065372341 @default.
• W4376272018 cites W2406490036 @default.
• W4376272018 doi "https://doi.org/10.1109/asmc57536.2023.10121135" @default.
• W4376272018 hasPublicationYear "2023" @default.
• W4376272018 type Work @default.
• W4376272018 citedByCount "0" @default.
• W4376272018 crossrefType "proceedings-article" @default.
• W4376272018 hasAuthorship W4376272018A5003127003 @default.
• W4376272018 hasAuthorship W4376272018A5004404477 @default.
• W4376272018 hasAuthorship W4376272018A5007230969 @default.
• W4376272018 hasAuthorship W4376272018A5021367161 @default.
• W4376272018 hasAuthorship W4376272018A5028062235 @default.
• W4376272018 hasAuthorship W4376272018A5051204921 @default.
• W4376272018 hasAuthorship W4376272018A5057663679 @default.
• W4376272018 hasAuthorship W4376272018A5068129840 @default.
• W4376272018 hasAuthorship W4376272018A5073736649 @default.
• W4376272018 hasAuthorship W4376272018A5080700909 @default.
• W4376272018 hasAuthorship W4376272018A5083193033 @default.
• W4376272018 hasConcept C100460472 @default.
• W4376272018 hasConcept C111919701 @default.
• W4376272018 hasConcept C118792377 @default.
• W4376272018 hasConcept C1291036 @default.
• W4376272018 hasConcept C134121241 @default.
• W4376272018 hasConcept C136525101 @default.
• W4376272018 hasConcept C142724271 @default.
• W4376272018 hasConcept C157764524 @default.
• W4376272018 hasConcept C159985019 @default.
• W4376272018 hasConcept C161790260 @default.
• W4376272018 hasConcept C171250308 @default.
• W4376272018 hasConcept C185592680 @default.
• W4376272018 hasConcept C191897082 @default.
• W4376272018 hasConcept C192562407 @default.
• W4376272018 hasConcept C204787440 @default.
• W4376272018 hasConcept C2779227376 @default.
• W4376272018 hasConcept C2779851234 @default.
• W4376272018 hasConcept C41008148 @default.
• W4376272018 hasConcept C49040817 @default.
• W4376272018 hasConcept C55493867 @default.
• W4376272018 hasConcept C555944384 @default.
• W4376272018 hasConcept C71924100 @default.
• W4376272018 hasConcept C76155785 @default.
• W4376272018 hasConcept C91721477 @default.
• W4376272018 hasConcept C98045186 @default.
• W4376272018 hasConceptScore W4376272018C100460472 @default.
• W4376272018 hasConceptScore W4376272018C111919701 @default.
• W4376272018 hasConceptScore W4376272018C118792377 @default.
• W4376272018 hasConceptScore W4376272018C1291036 @default.
• W4376272018 hasConceptScore W4376272018C134121241 @default.
• W4376272018 hasConceptScore W4376272018C136525101 @default.
• W4376272018 hasConceptScore W4376272018C142724271 @default.
• W4376272018 hasConceptScore W4376272018C157764524 @default.
• W4376272018 hasConceptScore W4376272018C159985019 @default.
• W4376272018 hasConceptScore W4376272018C161790260 @default.
• W4376272018 hasConceptScore W4376272018C171250308 @default.
• W4376272018 hasConceptScore W4376272018C185592680 @default.
• W4376272018 hasConceptScore W4376272018C191897082 @default.
• W4376272018 hasConceptScore W4376272018C192562407 @default.
• W4376272018 hasConceptScore W4376272018C204787440 @default.
• W4376272018 hasConceptScore W4376272018C2779227376 @default.
• W4376272018 hasConceptScore W4376272018C2779851234 @default.
• W4376272018 hasConceptScore W4376272018C41008148 @default.
• W4376272018 hasConceptScore W4376272018C49040817 @default.
• W4376272018 hasConceptScore W4376272018C55493867 @default.
• W4376272018 hasConceptScore W4376272018C555944384 @default.
• W4376272018 hasConceptScore W4376272018C71924100 @default.
• W4376272018 hasConceptScore W4376272018C76155785 @default.
• W4376272018 hasConceptScore W4376272018C91721477 @default.
• W4376272018 hasConceptScore W4376272018C98045186 @default.
• W4376272018 hasLocation W43762720181 @default.
• W4376272018 hasOpenAccess W4376272018 @default.
• W4376272018 hasPrimaryLocation W43762720181 @default.
• W4376272018 hasRelatedWork W1513857814 @default.
• W4376272018 hasRelatedWork W1967236012 @default.
• W4376272018 hasRelatedWork W2002854597 @default.
• W4376272018 hasRelatedWork W2031175500 @default.
• W4376272018 hasRelatedWork W2034845682 @default.
• W4376272018 hasRelatedWork W2044366676 @default.
• W4376272018 hasRelatedWork W2152866957 @default.
• W4376272018 hasRelatedWork W2510004302 @default.
• W4376272018 hasRelatedWork W2571639027 @default.

• next