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• W4376272124 abstract "We discuss the process challenges such as the heater geometry effect, heater patterning processes and deep via formation. Based on the electrical data, we improve the processes and Phase Change memory (PCM) resistance distribution to meet Analog Computing requirement." @default.
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• W4376272124 date "2023-05-01" @default.
• W4376272124 modified "2023-10-18" @default.
• W4376272124 title "Process Challenge in Analog Computing Hardware using Phase Change Memory (PCM)" @default.
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• W4376272124 doi "https://doi.org/10.1109/asmc57536.2023.10121078" @default.
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