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- W4376606575 abstract "We study the impact of fabrication thermal budget on stress-induced defect generation in HfO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> /SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> stacks compatible with novel Sequential 3D integration. By using stress-induced leakage current (SILC) spectroscopy we show that gate stacks fabricated at low thermal budget, compatible with top-tier integration have a significant pre-existing defect density. We use breakdown and successive breakdown statistics to estimate the number of percolation paths at time zero as a function of the area. Finally, we introduce a modified all-in-one reliability plot that incorporates the impact of the pre-existing defect density on lifetime projection." @default.
- W4376606575 created "2023-05-17" @default.
- W4376606575 creator A5009544942 @default.
- W4376606575 creator A5051111763 @default.
- W4376606575 creator A5058263075 @default.
- W4376606575 creator A5061087611 @default.
- W4376606575 creator A5068577719 @default.
- W4376606575 creator A5073310038 @default.
- W4376606575 date "2023-03-01" @default.
- W4376606575 modified "2023-10-02" @default.
- W4376606575 title "Analysis of TDDB lifetime projection in low thermal budget HfO<sub>2</sub>/SiO<sub>2</sub> stacks for sequential 3D integrations" @default.
- W4376606575 doi "https://doi.org/10.1109/irps48203.2023.10117955" @default.
- W4376606575 hasPublicationYear "2023" @default.
- W4376606575 type Work @default.
- W4376606575 citedByCount "0" @default.
- W4376606575 crossrefType "proceedings-article" @default.
- W4376606575 hasAuthorship W4376606575A5009544942 @default.
- W4376606575 hasAuthorship W4376606575A5051111763 @default.
- W4376606575 hasAuthorship W4376606575A5058263075 @default.
- W4376606575 hasAuthorship W4376606575A5061087611 @default.
- W4376606575 hasAuthorship W4376606575A5068577719 @default.
- W4376606575 hasAuthorship W4376606575A5073310038 @default.
- W4376606575 hasConcept C11413529 @default.
- W4376606575 hasConcept C119599485 @default.
- W4376606575 hasConcept C120398109 @default.
- W4376606575 hasConcept C121332964 @default.
- W4376606575 hasConcept C127413603 @default.
- W4376606575 hasConcept C136525101 @default.
- W4376606575 hasConcept C139719470 @default.
- W4376606575 hasConcept C142724271 @default.
- W4376606575 hasConcept C152909973 @default.
- W4376606575 hasConcept C162324750 @default.
- W4376606575 hasConcept C163258240 @default.
- W4376606575 hasConcept C165801399 @default.
- W4376606575 hasConcept C169760540 @default.
- W4376606575 hasConcept C172385210 @default.
- W4376606575 hasConcept C192562407 @default.
- W4376606575 hasConcept C204530211 @default.
- W4376606575 hasConcept C204787440 @default.
- W4376606575 hasConcept C2361726 @default.
- W4376606575 hasConcept C24326235 @default.
- W4376606575 hasConcept C2777042071 @default.
- W4376606575 hasConcept C2780457167 @default.
- W4376606575 hasConcept C41008148 @default.
- W4376606575 hasConcept C43214815 @default.
- W4376606575 hasConcept C49040817 @default.
- W4376606575 hasConcept C57493831 @default.
- W4376606575 hasConcept C71924100 @default.
- W4376606575 hasConcept C86642149 @default.
- W4376606575 hasConcept C86803240 @default.
- W4376606575 hasConcept C97355855 @default.
- W4376606575 hasConceptScore W4376606575C11413529 @default.
- W4376606575 hasConceptScore W4376606575C119599485 @default.
- W4376606575 hasConceptScore W4376606575C120398109 @default.
- W4376606575 hasConceptScore W4376606575C121332964 @default.
- W4376606575 hasConceptScore W4376606575C127413603 @default.
- W4376606575 hasConceptScore W4376606575C136525101 @default.
- W4376606575 hasConceptScore W4376606575C139719470 @default.
- W4376606575 hasConceptScore W4376606575C142724271 @default.
- W4376606575 hasConceptScore W4376606575C152909973 @default.
- W4376606575 hasConceptScore W4376606575C162324750 @default.
- W4376606575 hasConceptScore W4376606575C163258240 @default.
- W4376606575 hasConceptScore W4376606575C165801399 @default.
- W4376606575 hasConceptScore W4376606575C169760540 @default.
- W4376606575 hasConceptScore W4376606575C172385210 @default.
- W4376606575 hasConceptScore W4376606575C192562407 @default.
- W4376606575 hasConceptScore W4376606575C204530211 @default.
- W4376606575 hasConceptScore W4376606575C204787440 @default.
- W4376606575 hasConceptScore W4376606575C2361726 @default.
- W4376606575 hasConceptScore W4376606575C24326235 @default.
- W4376606575 hasConceptScore W4376606575C2777042071 @default.
- W4376606575 hasConceptScore W4376606575C2780457167 @default.
- W4376606575 hasConceptScore W4376606575C41008148 @default.
- W4376606575 hasConceptScore W4376606575C43214815 @default.
- W4376606575 hasConceptScore W4376606575C49040817 @default.
- W4376606575 hasConceptScore W4376606575C57493831 @default.
- W4376606575 hasConceptScore W4376606575C71924100 @default.
- W4376606575 hasConceptScore W4376606575C86642149 @default.
- W4376606575 hasConceptScore W4376606575C86803240 @default.
- W4376606575 hasConceptScore W4376606575C97355855 @default.
- W4376606575 hasLocation W43766065751 @default.
- W4376606575 hasOpenAccess W4376606575 @default.
- W4376606575 hasPrimaryLocation W43766065751 @default.
- W4376606575 hasRelatedWork W1569363950 @default.
- W4376606575 hasRelatedWork W2052581029 @default.
- W4376606575 hasRelatedWork W2060744985 @default.
- W4376606575 hasRelatedWork W2079714171 @default.
- W4376606575 hasRelatedWork W2088113479 @default.
- W4376606575 hasRelatedWork W2097915293 @default.
- W4376606575 hasRelatedWork W2147178768 @default.
- W4376606575 hasRelatedWork W2159229725 @default.
- W4376606575 hasRelatedWork W2542553308 @default.
- W4376606575 hasRelatedWork W3134256335 @default.
- W4376606575 isParatext "false" @default.
- W4376606575 isRetracted "false" @default.
- W4376606575 workType "article" @default.