Matches in SemOpenAlex for { <https://semopenalex.org/work/W4376606783> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W4376606783 abstract "With hybrid bonding (HB) pitch reduction, many challenges are arising. One of them is related to the reliability of HB-based interconnects and in particular their electromigration performances as electromigration (EM)-related degradation is intimately linked to the electrical current in addition to temperature and mechanical stresses. This study highlights a change in the failure modes for EM-related failures in HB-based interconnects when decreasing the interconnect pitch from 6.84 down to 1.44 µm. The weakest link moves from the BEOL levels to hybrid bonding ones but without affecting the projected performance under use conditions. Additional studies done on design aspects do not evidence any negative impact on the electro migration resistance of the HB brick." @default.
- W4376606783 created "2023-05-17" @default.
- W4376606783 creator A5031638673 @default.
- W4376606783 creator A5034531232 @default.
- W4376606783 creator A5042498129 @default.
- W4376606783 creator A5051003297 @default.
- W4376606783 creator A5060711149 @default.
- W4376606783 creator A5076482453 @default.
- W4376606783 creator A5077684573 @default.
- W4376606783 date "2023-03-01" @default.
- W4376606783 modified "2023-10-17" @default.
- W4376606783 title "Recent Advances on Electromigration in Cu/SiO<sub>2</sub> to Cu/SiO<sub>2</sub> Hybrid Bonds for 3D Integrated Circuits" @default.
- W4376606783 doi "https://doi.org/10.1109/irps48203.2023.10118173" @default.
- W4376606783 hasPublicationYear "2023" @default.
- W4376606783 type Work @default.
- W4376606783 citedByCount "0" @default.
- W4376606783 crossrefType "proceedings-article" @default.
- W4376606783 hasAuthorship W4376606783A5031638673 @default.
- W4376606783 hasAuthorship W4376606783A5034531232 @default.
- W4376606783 hasAuthorship W4376606783A5042498129 @default.
- W4376606783 hasAuthorship W4376606783A5051003297 @default.
- W4376606783 hasAuthorship W4376606783A5060711149 @default.
- W4376606783 hasAuthorship W4376606783A5076482453 @default.
- W4376606783 hasAuthorship W4376606783A5077684573 @default.
- W4376606783 hasConcept C119599485 @default.
- W4376606783 hasConcept C121332964 @default.
- W4376606783 hasConcept C123745756 @default.
- W4376606783 hasConcept C127413603 @default.
- W4376606783 hasConcept C134146338 @default.
- W4376606783 hasConcept C138055206 @default.
- W4376606783 hasConcept C159985019 @default.
- W4376606783 hasConcept C163258240 @default.
- W4376606783 hasConcept C192562407 @default.
- W4376606783 hasConcept C207740977 @default.
- W4376606783 hasConcept C24326235 @default.
- W4376606783 hasConcept C2779679103 @default.
- W4376606783 hasConcept C41008148 @default.
- W4376606783 hasConcept C43214815 @default.
- W4376606783 hasConcept C49040817 @default.
- W4376606783 hasConcept C530198007 @default.
- W4376606783 hasConcept C61696701 @default.
- W4376606783 hasConcept C62520636 @default.
- W4376606783 hasConcept C76155785 @default.
- W4376606783 hasConcept C97355855 @default.
- W4376606783 hasConceptScore W4376606783C119599485 @default.
- W4376606783 hasConceptScore W4376606783C121332964 @default.
- W4376606783 hasConceptScore W4376606783C123745756 @default.
- W4376606783 hasConceptScore W4376606783C127413603 @default.
- W4376606783 hasConceptScore W4376606783C134146338 @default.
- W4376606783 hasConceptScore W4376606783C138055206 @default.
- W4376606783 hasConceptScore W4376606783C159985019 @default.
- W4376606783 hasConceptScore W4376606783C163258240 @default.
- W4376606783 hasConceptScore W4376606783C192562407 @default.
- W4376606783 hasConceptScore W4376606783C207740977 @default.
- W4376606783 hasConceptScore W4376606783C24326235 @default.
- W4376606783 hasConceptScore W4376606783C2779679103 @default.
- W4376606783 hasConceptScore W4376606783C41008148 @default.
- W4376606783 hasConceptScore W4376606783C43214815 @default.
- W4376606783 hasConceptScore W4376606783C49040817 @default.
- W4376606783 hasConceptScore W4376606783C530198007 @default.
- W4376606783 hasConceptScore W4376606783C61696701 @default.
- W4376606783 hasConceptScore W4376606783C62520636 @default.
- W4376606783 hasConceptScore W4376606783C76155785 @default.
- W4376606783 hasConceptScore W4376606783C97355855 @default.
- W4376606783 hasLocation W43766067831 @default.
- W4376606783 hasOpenAccess W4376606783 @default.
- W4376606783 hasPrimaryLocation W43766067831 @default.
- W4376606783 hasRelatedWork W2026062724 @default.
- W4376606783 hasRelatedWork W2089977110 @default.
- W4376606783 hasRelatedWork W2096748507 @default.
- W4376606783 hasRelatedWork W2135610295 @default.
- W4376606783 hasRelatedWork W2137441628 @default.
- W4376606783 hasRelatedWork W2160638646 @default.
- W4376606783 hasRelatedWork W2189079683 @default.
- W4376606783 hasRelatedWork W238586610 @default.
- W4376606783 hasRelatedWork W4251771417 @default.
- W4376606783 hasRelatedWork W1600725266 @default.
- W4376606783 isParatext "false" @default.
- W4376606783 isRetracted "false" @default.
- W4376606783 workType "article" @default.