FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4377012918> ?p ?o ?g. }

• W4377012918 endingPage "064001" @default.
• W4377012918 startingPage "064001" @default.
• W4377012918 abstract "Abstract In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo collision (PIC/MCC) simulations have been proven to be an important tool for the understanding of the physics of low pressure capacitive discharges. However, there is a long-standing issue that the plasma density determined by PIC/MCC simulations shows quantitative deviations from experimental measurements, even in argon discharges, indicating that certain physics may be missing in previous modeling of the low pressure radio frequency (rf) driven capacitive discharges. In this work, we report that the energetic electron-induced secondary electron emission (SEE) and excited state atoms play an important role in low pressure rf capacitive argon plasma discharges. The ion-induced secondary electrons are accelerated by the high sheath field to strike the opposite electrode and produce a considerable number of secondary electrons that lead to additional ionizing impacts and further increase of the plasma density. Importantly, the presence of excited state species even further enhances the plasma density via excited state neutral and resonant state photon-induced SEE on the electrode surface. The PIC/MCC simulation results show good agreement with the recent experimental measurements in the low pressure range (1–10 Pa) that is commonly used for etching in the semiconductor industry. At the highest pressure (20 Pa) and driving voltage amplitudes 250 and 350 V explored here, the plasma densities from PIC/MCC simulations considering excited state neutrals and resonant photon-induced SEE are quantitatively higher than observed in the experiments, requiring further investigation on high pressure discharges." @default.
• W4377012918 created "2023-05-19" @default.
• W4377012918 creator A5002845247 @default.
• W4377012918 creator A5018691655 @default.
• W4377012918 creator A5026632945 @default.
• W4377012918 creator A5033303813 @default.
• W4377012918 creator A5047679712 @default.
• W4377012918 creator A5065389810 @default.
• W4377012918 creator A5081242145 @default.
• W4377012918 date "2023-06-01" @default.
• W4377012918 modified "2023-09-28" @default.
• W4377012918 title "On the importance of excited state species in low pressure capacitively coupled plasma argon discharges" @default.
• W4377012918 cites W1967661256 @default.
• W4377012918 cites W1968133052 @default.
• W4377012918 cites W1978330229 @default.
• W4377012918 cites W1979148895 @default.
• W4377012918 cites W1985330617 @default.
• W4377012918 cites W1993361798 @default.
• W4377012918 cites W1997999379 @default.
• W4377012918 cites W2005617557 @default.
• W4377012918 cites W2015916031 @default.
• W4377012918 cites W2017981825 @default.
• W4377012918 cites W2019014090 @default.
• W4377012918 cites W2021305709 @default.
• W4377012918 cites W2021732228 @default.
• W4377012918 cites W2024053905 @default.
• W4377012918 cites W2026753060 @default.
• W4377012918 cites W2031699298 @default.
• W4377012918 cites W2043839114 @default.
• W4377012918 cites W2048338165 @default.
• W4377012918 cites W2050668733 @default.
• W4377012918 cites W2052729107 @default.
• W4377012918 cites W2054836295 @default.
• W4377012918 cites W2061139552 @default.
• W4377012918 cites W2063407227 @default.
• W4377012918 cites W2067653140 @default.
• W4377012918 cites W2073793879 @default.
• W4377012918 cites W2088506064 @default.
• W4377012918 cites W2089810689 @default.
• W4377012918 cites W2091534654 @default.
• W4377012918 cites W2092888881 @default.
• W4377012918 cites W2095330603 @default.
• W4377012918 cites W2100434869 @default.
• W4377012918 cites W2106280329 @default.
• W4377012918 cites W2126762956 @default.
• W4377012918 cites W2159391442 @default.
• W4377012918 cites W2161845585 @default.
• W4377012918 cites W2165215367 @default.
• W4377012918 cites W2242895055 @default.
• W4377012918 cites W2512030621 @default.
• W4377012918 cites W2524929352 @default.
• W4377012918 cites W2769922455 @default.
• W4377012918 cites W2887236341 @default.
• W4377012918 cites W2902977186 @default.
• W4377012918 cites W2934625416 @default.
• W4377012918 cites W2949465676 @default.
• W4377012918 cites W2964881291 @default.
• W4377012918 cites W2971956237 @default.
• W4377012918 cites W2992900146 @default.
• W4377012918 cites W2999815143 @default.
• W4377012918 cites W3023793049 @default.
• W4377012918 cites W3023956259 @default.
• W4377012918 cites W3024443724 @default.
• W4377012918 cites W3037605242 @default.
• W4377012918 cites W3044589540 @default.
• W4377012918 cites W3047429726 @default.
• W4377012918 cites W3080670231 @default.
• W4377012918 cites W3086050233 @default.
• W4377012918 cites W3102828069 @default.
• W4377012918 cites W3136014895 @default.
• W4377012918 cites W3140841442 @default.
• W4377012918 cites W3152130577 @default.
• W4377012918 cites W3187757891 @default.
• W4377012918 cites W3198249086 @default.
• W4377012918 cites W3208897548 @default.
• W4377012918 cites W4200312582 @default.
• W4377012918 cites W4200329086 @default.
• W4377012918 cites W4224114838 @default.
• W4377012918 cites W4280559399 @default.
• W4377012918 cites W4286001814 @default.
• W4377012918 cites W4292421545 @default.
• W4377012918 cites W4293195788 @default.
• W4377012918 cites W4307048928 @default.
• W4377012918 doi "https://doi.org/10.1088/1361-6595/acd6b4" @default.
• W4377012918 hasPublicationYear "2023" @default.
• W4377012918 type Work @default.
• W4377012918 citedByCount "2" @default.
• W4377012918 countsByYear W43770129182023 @default.
• W4377012918 crossrefType "journal-article" @default.
• W4377012918 hasAuthorship W4377012918A5002845247 @default.
• W4377012918 hasAuthorship W4377012918A5018691655 @default.
• W4377012918 hasAuthorship W4377012918A5026632945 @default.
• W4377012918 hasAuthorship W4377012918A5033303813 @default.
• W4377012918 hasAuthorship W4377012918A5047679712 @default.
• W4377012918 hasAuthorship W4377012918A5065389810 @default.
• W4377012918 hasAuthorship W4377012918A5081242145 @default.
• W4377012918 hasBestOaLocation W43770129181 @default.
• W4377012918 hasConcept C111919701 @default.

• next