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• W4377691714 abstract "This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future." @default.
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• W4377691714 date "2023-06-01" @default.
• W4377691714 modified "2023-10-14" @default.
• W4377691714 title "Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators" @default.
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• W4377691714 doi "https://doi.org/10.1016/j.mne.2023.100212" @default.
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