Matches in SemOpenAlex for { <https://semopenalex.org/work/W4377698522> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W4377698522 abstract "The micro-via is a sandwiched structure with Cu electrolyte plating/electroless Cu plating/Cu electrolyte plating Pad, and the quality of the electroless Cu layer significantly affects the reliability of micro-via. In this work, we investigated the elemental ingredient of micro-vias which were prepared by a traditional electroless Cu plating method and a newly developed electroless Cu plating method by time of flight secondary ion mass spectrometry (TOF-SIMS) and scanning transmission electron microscopy (STEM). It is found that the concentration of hydrogen, oxygen and several elements exist in the electroless Cu layer prepared by traditional method compared to the new one. These can be a potential risk of nanovoids formation in the electroless Cu layer and decrease the reliability of HDI substrate." @default.
- W4377698522 created "2023-05-24" @default.
- W4377698522 creator A5025191431 @default.
- W4377698522 creator A5042506049 @default.
- W4377698522 creator A5051994222 @default.
- W4377698522 creator A5055249358 @default.
- W4377698522 creator A5070481334 @default.
- W4377698522 creator A5077691409 @default.
- W4377698522 creator A5088824951 @default.
- W4377698522 creator A5088888083 @default.
- W4377698522 creator A5090747333 @default.
- W4377698522 creator A5092000810 @default.
- W4377698522 date "2023-04-19" @default.
- W4377698522 modified "2023-10-16" @default.
- W4377698522 title "Study of Cu Micro-via by TOF-SIMS and STEM" @default.
- W4377698522 cites W2049870318 @default.
- W4377698522 doi "https://doi.org/10.23919/icep58572.2023.10129689" @default.
- W4377698522 hasPublicationYear "2023" @default.
- W4377698522 type Work @default.
- W4377698522 citedByCount "0" @default.
- W4377698522 crossrefType "proceedings-article" @default.
- W4377698522 hasAuthorship W4377698522A5025191431 @default.
- W4377698522 hasAuthorship W4377698522A5042506049 @default.
- W4377698522 hasAuthorship W4377698522A5051994222 @default.
- W4377698522 hasAuthorship W4377698522A5055249358 @default.
- W4377698522 hasAuthorship W4377698522A5070481334 @default.
- W4377698522 hasAuthorship W4377698522A5077691409 @default.
- W4377698522 hasAuthorship W4377698522A5088824951 @default.
- W4377698522 hasAuthorship W4377698522A5088888083 @default.
- W4377698522 hasAuthorship W4377698522A5090747333 @default.
- W4377698522 hasAuthorship W4377698522A5092000810 @default.
- W4377698522 hasConcept C111368507 @default.
- W4377698522 hasConcept C127313418 @default.
- W4377698522 hasConcept C127413603 @default.
- W4377698522 hasConcept C145148216 @default.
- W4377698522 hasConcept C146088050 @default.
- W4377698522 hasConcept C147789679 @default.
- W4377698522 hasConcept C159985019 @default.
- W4377698522 hasConcept C171250308 @default.
- W4377698522 hasConcept C17525397 @default.
- W4377698522 hasConcept C178790620 @default.
- W4377698522 hasConcept C185592680 @default.
- W4377698522 hasConcept C191897082 @default.
- W4377698522 hasConcept C192562407 @default.
- W4377698522 hasConcept C26771246 @default.
- W4377698522 hasConcept C2776985018 @default.
- W4377698522 hasConcept C2777289219 @default.
- W4377698522 hasConcept C2779227376 @default.
- W4377698522 hasConcept C2780727033 @default.
- W4377698522 hasConcept C29216876 @default.
- W4377698522 hasConcept C42360764 @default.
- W4377698522 hasConcept C51807945 @default.
- W4377698522 hasConcept C544778455 @default.
- W4377698522 hasConcept C68801617 @default.
- W4377698522 hasConcept C77671233 @default.
- W4377698522 hasConcept C8058405 @default.
- W4377698522 hasConceptScore W4377698522C111368507 @default.
- W4377698522 hasConceptScore W4377698522C127313418 @default.
- W4377698522 hasConceptScore W4377698522C127413603 @default.
- W4377698522 hasConceptScore W4377698522C145148216 @default.
- W4377698522 hasConceptScore W4377698522C146088050 @default.
- W4377698522 hasConceptScore W4377698522C147789679 @default.
- W4377698522 hasConceptScore W4377698522C159985019 @default.
- W4377698522 hasConceptScore W4377698522C171250308 @default.
- W4377698522 hasConceptScore W4377698522C17525397 @default.
- W4377698522 hasConceptScore W4377698522C178790620 @default.
- W4377698522 hasConceptScore W4377698522C185592680 @default.
- W4377698522 hasConceptScore W4377698522C191897082 @default.
- W4377698522 hasConceptScore W4377698522C192562407 @default.
- W4377698522 hasConceptScore W4377698522C26771246 @default.
- W4377698522 hasConceptScore W4377698522C2776985018 @default.
- W4377698522 hasConceptScore W4377698522C2777289219 @default.
- W4377698522 hasConceptScore W4377698522C2779227376 @default.
- W4377698522 hasConceptScore W4377698522C2780727033 @default.
- W4377698522 hasConceptScore W4377698522C29216876 @default.
- W4377698522 hasConceptScore W4377698522C42360764 @default.
- W4377698522 hasConceptScore W4377698522C51807945 @default.
- W4377698522 hasConceptScore W4377698522C544778455 @default.
- W4377698522 hasConceptScore W4377698522C68801617 @default.
- W4377698522 hasConceptScore W4377698522C77671233 @default.
- W4377698522 hasConceptScore W4377698522C8058405 @default.
- W4377698522 hasFunder F4320323584 @default.
- W4377698522 hasFunder F4320337504 @default.
- W4377698522 hasLocation W43776985221 @default.
- W4377698522 hasOpenAccess W4377698522 @default.
- W4377698522 hasPrimaryLocation W43776985221 @default.
- W4377698522 hasRelatedWork W1987658782 @default.
- W4377698522 hasRelatedWork W2094442857 @default.
- W4377698522 hasRelatedWork W2167242356 @default.
- W4377698522 hasRelatedWork W2376083157 @default.
- W4377698522 hasRelatedWork W2379489181 @default.
- W4377698522 hasRelatedWork W2393245110 @default.
- W4377698522 hasRelatedWork W2480106052 @default.
- W4377698522 hasRelatedWork W3129379458 @default.
- W4377698522 hasRelatedWork W4210864046 @default.
- W4377698522 hasRelatedWork W4234905282 @default.
- W4377698522 isParatext "false" @default.
- W4377698522 isRetracted "false" @default.
- W4377698522 workType "article" @default.