FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4377710428> ?p ?o ?g. }

• W4377710428 endingPage "3660" @default.
• W4377710428 startingPage "3656" @default.
• W4377710428 abstract "The electrical conduction of polysilicon can be improved through the passivation of defects located at grain boundaries. Most passivation proceeds by hydrogen bonding to dangling bonds of silicon. However, more research is needed on the reliability of the Si-H bond. A process using deuterium instead of hydrogen can be expected to improve the performance of silicon devices because Si-D bonds have much higher stability than Si-H bonds. In this study, we have investigated how the isotope effect appears in polysilicon applications. For this purpose, a photodetector composed of a polysilicon film incorporated with hydrogen or deuterium was prepared, and then, current–voltage ( <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${I}$ </tex-math></inline-formula> – <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${V}$ </tex-math></inline-formula> ) characteristics, photo response, and degradation thereof were investigated. Hydrogen and deuterium incorporation was performed by both furnace annealing and ion implantation methods. It was found that in order for the isotope effect to occur in polysilicon grain structure, the density of grain boundary must be maintained properly, and there must be no additional damage during the hydrogen or deuterium process. Through this study, it was confirmed that the electrical characteristics and the reliability of the polysilicon based-photodetector were improved by forming a Si-D bond inside the polysilicon with the furnace annealing." @default.
• W4377710428 created "2023-05-24" @default.
• W4377710428 creator A5032898404 @default.
• W4377710428 date "2023-07-01" @default.
• W4377710428 modified "2023-09-27" @default.
• W4377710428 title "Isotope Effect in Electrical Characteristics of Polysilicon Based-Photodetector" @default.
• W4377710428 cites W1982381330 @default.
• W4377710428 cites W2002356435 @default.
• W4377710428 cites W2005472036 @default.
• W4377710428 cites W2011333960 @default.
• W4377710428 cites W2025957778 @default.
• W4377710428 cites W2041497556 @default.
• W4377710428 cites W2042400613 @default.
• W4377710428 cites W2044397311 @default.
• W4377710428 cites W2054224379 @default.
• W4377710428 cites W2061881596 @default.
• W4377710428 cites W2074929230 @default.
• W4377710428 cites W2093446542 @default.
• W4377710428 cites W2107955262 @default.
• W4377710428 cites W2110391381 @default.
• W4377710428 cites W2117991423 @default.
• W4377710428 cites W2123046419 @default.
• W4377710428 cites W2136122966 @default.
• W4377710428 cites W2156124697 @default.
• W4377710428 cites W2471167671 @default.
• W4377710428 cites W4206987314 @default.
• W4377710428 doi "https://doi.org/10.1109/ted.2023.3276727" @default.
• W4377710428 hasPublicationYear "2023" @default.
• W4377710428 type Work @default.
• W4377710428 citedByCount "0" @default.
• W4377710428 crossrefType "journal-article" @default.
• W4377710428 hasAuthorship W4377710428A5032898404 @default.
• W4377710428 hasConcept C113196181 @default.
• W4377710428 hasConcept C119599485 @default.
• W4377710428 hasConcept C121332964 @default.
• W4377710428 hasConcept C127413603 @default.
• W4377710428 hasConcept C159985019 @default.
• W4377710428 hasConcept C165801399 @default.
• W4377710428 hasConcept C171250308 @default.
• W4377710428 hasConcept C172385210 @default.
• W4377710428 hasConcept C178790620 @default.
• W4377710428 hasConcept C184779094 @default.
• W4377710428 hasConcept C185592680 @default.
• W4377710428 hasConcept C192562407 @default.
• W4377710428 hasConcept C23125352 @default.
• W4377710428 hasConcept C2361726 @default.
• W4377710428 hasConcept C25356406 @default.
• W4377710428 hasConcept C2777855556 @default.
• W4377710428 hasConcept C2779227376 @default.
• W4377710428 hasConcept C32424582 @default.
• W4377710428 hasConcept C33574316 @default.
• W4377710428 hasConcept C47908070 @default.
• W4377710428 hasConcept C49040817 @default.
• W4377710428 hasConcept C512968161 @default.
• W4377710428 hasConcept C544956773 @default.
• W4377710428 hasConcept C58364064 @default.
• W4377710428 hasConcept C87976508 @default.
• W4377710428 hasConceptScore W4377710428C113196181 @default.
• W4377710428 hasConceptScore W4377710428C119599485 @default.
• W4377710428 hasConceptScore W4377710428C121332964 @default.
• W4377710428 hasConceptScore W4377710428C127413603 @default.
• W4377710428 hasConceptScore W4377710428C159985019 @default.
• W4377710428 hasConceptScore W4377710428C165801399 @default.
• W4377710428 hasConceptScore W4377710428C171250308 @default.
• W4377710428 hasConceptScore W4377710428C172385210 @default.
• W4377710428 hasConceptScore W4377710428C178790620 @default.
• W4377710428 hasConceptScore W4377710428C184779094 @default.
• W4377710428 hasConceptScore W4377710428C185592680 @default.
• W4377710428 hasConceptScore W4377710428C192562407 @default.
• W4377710428 hasConceptScore W4377710428C23125352 @default.
• W4377710428 hasConceptScore W4377710428C2361726 @default.
• W4377710428 hasConceptScore W4377710428C25356406 @default.
• W4377710428 hasConceptScore W4377710428C2777855556 @default.
• W4377710428 hasConceptScore W4377710428C2779227376 @default.
• W4377710428 hasConceptScore W4377710428C32424582 @default.
• W4377710428 hasConceptScore W4377710428C33574316 @default.
• W4377710428 hasConceptScore W4377710428C47908070 @default.
• W4377710428 hasConceptScore W4377710428C49040817 @default.
• W4377710428 hasConceptScore W4377710428C512968161 @default.
• W4377710428 hasConceptScore W4377710428C544956773 @default.
• W4377710428 hasConceptScore W4377710428C58364064 @default.
• W4377710428 hasConceptScore W4377710428C87976508 @default.
• W4377710428 hasIssue "7" @default.
• W4377710428 hasLocation W43777104281 @default.
• W4377710428 hasOpenAccess W4377710428 @default.
• W4377710428 hasPrimaryLocation W43777104281 @default.
• W4377710428 hasRelatedWork W1983355579 @default.
• W4377710428 hasRelatedWork W1990907204 @default.
• W4377710428 hasRelatedWork W1992643826 @default.
• W4377710428 hasRelatedWork W2002829018 @default.
• W4377710428 hasRelatedWork W2011205543 @default.
• W4377710428 hasRelatedWork W2017555277 @default.
• W4377710428 hasRelatedWork W2058826016 @default.
• W4377710428 hasRelatedWork W2064072391 @default.
• W4377710428 hasRelatedWork W2370327731 @default.
• W4377710428 hasRelatedWork W3159998650 @default.
• W4377710428 hasVolume "70" @default.
• W4377710428 isParatext "false" @default.

• next