Matches in SemOpenAlex for { <https://semopenalex.org/work/W4378216621> ?p ?o ?g. }
- W4378216621 endingPage "112" @default.
- W4378216621 startingPage "105" @default.
- W4378216621 abstract "To reduce manufacturing costs, high-quality 150 mm 4H-SiC wafers were grown at over 1.5 mm/h by high-temperature chemical vapor deposition. The dislocations in the initial growth stage did not increase compared with those in the seed crystal. The dislocation densities decreased during crystal growth, and the densities of threading dislocations and basal plane dislocations at the growth thickness of 7.1 mm were 1186 and 211 /cm 2 , respectively. The resolved shear stress, which is the cause of the increase in dislocations during growth, was calculated based on thermal fluid simulations; the shear stress of the grown crystal with a flat surface was small compared with that of the convex-shaped crystal. The dislocations did not increase likely because the crystals grown at high speeds were relatively flat. In addition, the decrease in dislocations was attributed to the frequent annihilation of dislocations due to the growth at a high temperature (2490 °C)." @default.
- W4378216621 created "2023-05-26" @default.
- W4378216621 creator A5001749718 @default.
- W4378216621 creator A5003171350 @default.
- W4378216621 creator A5006252244 @default.
- W4378216621 creator A5007443642 @default.
- W4378216621 creator A5020530887 @default.
- W4378216621 creator A5031049414 @default.
- W4378216621 creator A5053747260 @default.
- W4378216621 creator A5064571975 @default.
- W4378216621 creator A5081749381 @default.
- W4378216621 creator A5082724422 @default.
- W4378216621 creator A5083105346 @default.
- W4378216621 date "2023-05-25" @default.
- W4378216621 modified "2023-10-01" @default.
- W4378216621 title "Quality Evaluation of 150 mm 4H-SiC Grown at over 1.5 mm/h by High-Temperature Chemical Vapor Deposition Method" @default.
- W4378216621 cites W1966462978 @default.
- W4378216621 cites W2004087625 @default.
- W4378216621 cites W2009345904 @default.
- W4378216621 cites W2019016821 @default.
- W4378216621 cites W2034593619 @default.
- W4378216621 cites W2045152307 @default.
- W4378216621 cites W2060571862 @default.
- W4378216621 cites W2077768735 @default.
- W4378216621 cites W2081495284 @default.
- W4378216621 cites W2394777921 @default.
- W4378216621 cites W2407625609 @default.
- W4378216621 cites W2557683831 @default.
- W4378216621 cites W2743031980 @default.
- W4378216621 cites W2801005814 @default.
- W4378216621 cites W3045533015 @default.
- W4378216621 cites W3045805379 @default.
- W4378216621 cites W3046150390 @default.
- W4378216621 cites W3048253733 @default.
- W4378216621 cites W3210077572 @default.
- W4378216621 cites W4225007037 @default.
- W4378216621 doi "https://doi.org/10.4028/p-09h52t" @default.
- W4378216621 hasPublicationYear "2023" @default.
- W4378216621 type Work @default.
- W4378216621 citedByCount "0" @default.
- W4378216621 crossrefType "journal-article" @default.
- W4378216621 hasAuthorship W4378216621A5001749718 @default.
- W4378216621 hasAuthorship W4378216621A5003171350 @default.
- W4378216621 hasAuthorship W4378216621A5006252244 @default.
- W4378216621 hasAuthorship W4378216621A5007443642 @default.
- W4378216621 hasAuthorship W4378216621A5020530887 @default.
- W4378216621 hasAuthorship W4378216621A5031049414 @default.
- W4378216621 hasAuthorship W4378216621A5053747260 @default.
- W4378216621 hasAuthorship W4378216621A5064571975 @default.
- W4378216621 hasAuthorship W4378216621A5081749381 @default.
- W4378216621 hasAuthorship W4378216621A5082724422 @default.
- W4378216621 hasAuthorship W4378216621A5083105346 @default.
- W4378216621 hasBestOaLocation W43782166211 @default.
- W4378216621 hasConcept C104169306 @default.
- W4378216621 hasConcept C159122135 @default.
- W4378216621 hasConcept C159985019 @default.
- W4378216621 hasConcept C160671074 @default.
- W4378216621 hasConcept C185592680 @default.
- W4378216621 hasConcept C192562407 @default.
- W4378216621 hasConcept C199360897 @default.
- W4378216621 hasConcept C26456737 @default.
- W4378216621 hasConcept C2781285689 @default.
- W4378216621 hasConcept C2994038127 @default.
- W4378216621 hasConcept C41008148 @default.
- W4378216621 hasConcept C49040817 @default.
- W4378216621 hasConcept C57410435 @default.
- W4378216621 hasConcept C73922627 @default.
- W4378216621 hasConcept C8010536 @default.
- W4378216621 hasConceptScore W4378216621C104169306 @default.
- W4378216621 hasConceptScore W4378216621C159122135 @default.
- W4378216621 hasConceptScore W4378216621C159985019 @default.
- W4378216621 hasConceptScore W4378216621C160671074 @default.
- W4378216621 hasConceptScore W4378216621C185592680 @default.
- W4378216621 hasConceptScore W4378216621C192562407 @default.
- W4378216621 hasConceptScore W4378216621C199360897 @default.
- W4378216621 hasConceptScore W4378216621C26456737 @default.
- W4378216621 hasConceptScore W4378216621C2781285689 @default.
- W4378216621 hasConceptScore W4378216621C2994038127 @default.
- W4378216621 hasConceptScore W4378216621C41008148 @default.
- W4378216621 hasConceptScore W4378216621C49040817 @default.
- W4378216621 hasConceptScore W4378216621C57410435 @default.
- W4378216621 hasConceptScore W4378216621C73922627 @default.
- W4378216621 hasConceptScore W4378216621C8010536 @default.
- W4378216621 hasLocation W43782166211 @default.
- W4378216621 hasOpenAccess W4378216621 @default.
- W4378216621 hasPrimaryLocation W43782166211 @default.
- W4378216621 hasRelatedWork W1985592824 @default.
- W4378216621 hasRelatedWork W2002843159 @default.
- W4378216621 hasRelatedWork W2058231787 @default.
- W4378216621 hasRelatedWork W2071020360 @default.
- W4378216621 hasRelatedWork W2082524862 @default.
- W4378216621 hasRelatedWork W2095179843 @default.
- W4378216621 hasRelatedWork W2370990401 @default.
- W4378216621 hasRelatedWork W2393941926 @default.
- W4378216621 hasRelatedWork W2395653509 @default.
- W4378216621 hasRelatedWork W2963900185 @default.
- W4378216621 hasVolume "342" @default.
- W4378216621 isParatext "false" @default.